JPH02123055U - - Google Patents
Info
- Publication number
- JPH02123055U JPH02123055U JP3186589U JP3186589U JPH02123055U JP H02123055 U JPH02123055 U JP H02123055U JP 3186589 U JP3186589 U JP 3186589U JP 3186589 U JP3186589 U JP 3186589U JP H02123055 U JPH02123055 U JP H02123055U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma
- ion source
- aluminum
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3186589U JPH0719080Y2 (ja) | 1989-03-20 | 1989-03-20 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3186589U JPH0719080Y2 (ja) | 1989-03-20 | 1989-03-20 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02123055U true JPH02123055U (es) | 1990-10-09 |
| JPH0719080Y2 JPH0719080Y2 (ja) | 1995-05-01 |
Family
ID=31258052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3186589U Expired - Lifetime JPH0719080Y2 (ja) | 1989-03-20 | 1989-03-20 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719080Y2 (es) |
-
1989
- 1989-03-20 JP JP3186589U patent/JPH0719080Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719080Y2 (ja) | 1995-05-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |