JPS6318071B2 - - Google Patents
Info
- Publication number
- JPS6318071B2 JPS6318071B2 JP54118802A JP11880279A JPS6318071B2 JP S6318071 B2 JPS6318071 B2 JP S6318071B2 JP 54118802 A JP54118802 A JP 54118802A JP 11880279 A JP11880279 A JP 11880279A JP S6318071 B2 JPS6318071 B2 JP S6318071B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure
- air
- raw material
- mixer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 9
- 239000002994 raw material Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000001273 butane Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Pipeline Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880279A JPS5642799A (en) | 1979-09-18 | 1979-09-18 | Gas feed system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880279A JPS5642799A (en) | 1979-09-18 | 1979-09-18 | Gas feed system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15336179A Division JPS5644035A (en) | 1979-11-26 | 1979-11-26 | Fluid mixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5642799A JPS5642799A (en) | 1981-04-21 |
| JPS6318071B2 true JPS6318071B2 (enrdf_load_stackoverflow) | 1988-04-16 |
Family
ID=14745475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11880279A Granted JPS5642799A (en) | 1979-09-18 | 1979-09-18 | Gas feed system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5642799A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH035367U (enrdf_load_stackoverflow) * | 1989-06-09 | 1991-01-18 | ||
| US7504006B2 (en) | 2002-08-01 | 2009-03-17 | Applied Materials, Inc. | Self-ionized and capacitively-coupled plasma for sputtering and resputtering |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0121222Y2 (enrdf_load_stackoverflow) * | 1985-06-25 | 1989-06-26 | ||
| CN107261874A (zh) * | 2017-08-18 | 2017-10-20 | 云南省环境科学研究院(中国昆明高原湖泊国际研究中心) | 一种高精度的挥发性物质配气系统 |
-
1979
- 1979-09-18 JP JP11880279A patent/JPS5642799A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH035367U (enrdf_load_stackoverflow) * | 1989-06-09 | 1991-01-18 | ||
| US7504006B2 (en) | 2002-08-01 | 2009-03-17 | Applied Materials, Inc. | Self-ionized and capacitively-coupled plasma for sputtering and resputtering |
| US9062372B2 (en) | 2002-08-01 | 2015-06-23 | Applied Materials, Inc. | Self-ionized and capacitively-coupled plasma for sputtering and resputtering |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5642799A (en) | 1981-04-21 |
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