JPS63179643U - - Google Patents
Info
- Publication number
- JPS63179643U JPS63179643U JP7048987U JP7048987U JPS63179643U JP S63179643 U JPS63179643 U JP S63179643U JP 7048987 U JP7048987 U JP 7048987U JP 7048987 U JP7048987 U JP 7048987U JP S63179643 U JPS63179643 U JP S63179643U
- Authority
- JP
- Japan
- Prior art keywords
- rays
- plasma
- ray source
- charged particle
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- X-Ray Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7048987U JPS63179643U (enExample) | 1987-05-12 | 1987-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7048987U JPS63179643U (enExample) | 1987-05-12 | 1987-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63179643U true JPS63179643U (enExample) | 1988-11-21 |
Family
ID=30912172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7048987U Pending JPS63179643U (enExample) | 1987-05-12 | 1987-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63179643U (enExample) |
-
1987
- 1987-05-12 JP JP7048987U patent/JPS63179643U/ja active Pending
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