JPS63179314A - Measuring method for inclination error of reflecting surface of polygon mirror - Google Patents
Measuring method for inclination error of reflecting surface of polygon mirrorInfo
- Publication number
- JPS63179314A JPS63179314A JP1088487A JP1088487A JPS63179314A JP S63179314 A JPS63179314 A JP S63179314A JP 1088487 A JP1088487 A JP 1088487A JP 1088487 A JP1088487 A JP 1088487A JP S63179314 A JPS63179314 A JP S63179314A
- Authority
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- Prior art keywords
- polygon mirror
- error
- light
- inclination
- angle
- Prior art date
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- 238000000034 method Methods 0.000 title claims description 17
- 238000005259 measurement Methods 0.000 claims abstract description 28
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 abstract description 16
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 230000004907 flux Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
【発明の詳細な説明】
発明の目的
（産業上の利用分野）
本発明はポリゴンミラーの底面に対する１反射面の倒れ
誤差、いわゆるピラミッド誤差を測定するポリゴンミラ
ーの反射面の倒れ誤差測定方法の改良に関する。DETAILED DESCRIPTION OF THE INVENTION Purpose of the Invention (Industrial Application Field) The present invention is an improvement of a method for measuring inclination error of a reflecting surface of a polygon mirror, which measures inclination error of one reflecting surface with respect to the bottom surface of a polygon mirror, so-called pyramid error. Regarding.
（従来の技術）
従来から、レーザースキャナー、レーザープリンタ等の
走査式光学装置には、第４図に示すようなポリゴンミラ
ー１が用いられているが、各反射面１ａ〜１ｈの底面１
１に対する倒れ誤差にバラツキがあると、たとえば、レ
ーザープリンタでは、主走査方向に直交する副走査方向
の走査ライン間隔にバラツキを生じて、印字が歪む等の
減少を生じ。(Prior Art) Conventionally, a polygon mirror 1 as shown in FIG. 4 has been used in scanning optical devices such as laser scanners and laser printers.
For example, in a laser printer, if there is variation in the inclination error with respect to 1, there will be variation in the scanning line interval in the sub-scanning direction perpendicular to the main-scanning direction, resulting in distortion of printed characters and other reductions.
好ましくない結果を生じる。produce undesirable results.
そこで、従来から、ポリゴンミラー１の製作段階で、各
反射面１ａ”ｌｈの底面１１に対する倒れ誤差を測定し
ている。第５図は従来のポリゴンミラー１の反射面の倒
れ誤差を測定する測定方法の一例を説明するための説明
図であって、その第５図において、２はロータリーテー
ブル、３はそのロータリーテーブル２にセットされたレ
ベリングテーブルであり、水平出しをしてポリゴンミラ
ー１をレベリングテーブル３に載置し、ロータリーテー
ブル２をゆっくりと回転させ、振れ測定具４を用いてそ
のポリゴンミラー１の上下方向の振れを確認する。そし
て、その振れがほとんどない状態で、測定光学系５とし
てのたとえばオートコリメータ−からの測定光を反射面
１ａ”ｌｈに向かって出射する。Therefore, conventionally, the inclination error of each reflective surface 1a"lh with respect to the bottom surface 11 has been measured at the manufacturing stage of the polygon mirror 1. FIG. FIG. 5 is an explanatory diagram for explaining an example of the method, in which 2 is a rotary table, 3 is a leveling table set on the rotary table 2, and the polygon mirror 1 is leveled by leveling it. The rotary table 2 is placed on the table 3, and the rotary table 2 is slowly rotated, and the vertical deflection of the polygon mirror 1 is confirmed using the deflection measuring tool 4.Then, with almost no deflection, the measuring optical system 5 For example, measurement light from an autocollimator is emitted toward the reflective surface 1a''lh.
そのオートコリメーターは、たとえば、第６図に示すよ
うに、光源Ｓ、コンデンサレンズＬ、焦点ガラスＧ１、
半透過プリズムＲ１対物レンズ６、焦点ガラスＧ２、接
眼レンズＥを備えており、焦点ガラスＧ１と焦点ガラス
Ｇ、とは光学的に共役位置に配置され、対物レンズ６の
焦点Ｆの位置にある。For example, as shown in FIG. 6, the autocollimator includes a light source S, a condenser lens L, a focusing glass G1,
The semi-transparent prism R1 includes an objective lens 6, a focus glass G2, and an eyepiece E. The focus glass G1 and the focus glass G are arranged in an optically conjugate position, and are located at the focal point F of the objective lens 6.
焦点ガラスＧ、にはマークが設けられており。A mark is provided on the focusing glass G.
焦点ガラスＧ２にはレチクルとしての十字線と目盛とが
設けられており、たとえば１反射面１ａに倒れ誤差がな
いときには、対物レンズ６から出射された測定光Ｐは反
射面１ａで反射されて焦点ガラスＧ２の十字線の交点に
結像し、その交点にマークの像が形成される。仮りに、
反射面１ａの倒れ誤差がθであるとすると、対物レンズ
６から出射された測定光Ｐの反射方向が、倒れ誤差θが
ないと考えた場合の反射方向に対して角度にして２θ変
化する。その反射面１ａで反射された反射光は、対物レ
ンズ６によって焦点ガラスＧ、上に結像され、その結像
は十字線の交点から距離Δだけ変位した位置に生じる。The focusing glass G2 is provided with a crosshair as a reticle and a scale. For example, when there is no tilt error on one reflecting surface 1a, the measurement light P emitted from the objective lens 6 is reflected on the reflecting surface 1a and focused. An image is formed at the intersection of the crosshairs on the glass G2, and an image of the mark is formed at the intersection. If,
Assuming that the tilt error of the reflective surface 1a is θ, the reflection direction of the measurement light P emitted from the objective lens 6 changes by 2θ in angle with respect to the reflection direction when it is assumed that there is no tilt error θ. The reflected light reflected by the reflective surface 1a is imaged by the objective lens 6 onto the focusing glass G, and the image is formed at a position displaced by a distance Δ from the intersection of the crosshairs.
ここで、対物レンズ６の焦点距離をｆとすると、距離Δ
と焦点距離ｆと倒れ誤差θとの間には、
Δ＝２・ｆ・θ ・・・■
の関係式が成立する。なお、倒れ誤差θの単位はラジア
ンである。Here, if the focal length of the objective lens 6 is f, then the distance Δ
The relational expression Δ=2·f·θ...■ holds true between the focal length f and the tilting error θ. Note that the unit of the inclination error θ is radian.
したがって、距離Δがいくらであるかを接眼レンズＥを
通して測定すれば、倒れ誤差を測定できることになる。Therefore, if the distance Δ is measured through the eyepiece E, the tilting error can be measured.
なお、その第６図において、符号Ｐ′は反射面１ａで反
射されて対物レンズ６の中心を通る主光線である。In FIG. 6, reference numeral P' indicates a chief ray that is reflected by the reflecting surface 1a and passes through the center of the objective lens 6.
（発明が解決しようとする問題点）
ところが、その従来のオートコリメーターを用いて倒れ
誤差を測定する測定方法は、測定精度が小さいという問
題点がある。たとえば、大型サイズ（Ａ、サイズ）のレ
ーザープリンタに用いられるポリゴンミラー１では、倒
れ誤差θが１秒以内であることが要請されるが、焦点距
離ｆが５００ｍｍの対物レンズ６を用いて測定を行なう
ことにした場合、１秒の倒れ誤差θが距離Δとして約７
μｍになり、実際問題として１秒以下の角度誤差の測定
が困難である。また、ロータリーテーブル２に高精度の
ものを必要とすると共に、ポリゴンミラー１の振れの測
定等を行なわなければならないために、測定に入るまで
の準備に時間がかかるという問題点がある。(Problems to be Solved by the Invention) However, the conventional measurement method of measuring the inclination error using an autocollimator has a problem in that the measurement accuracy is low. For example, a polygon mirror 1 used in a large size (A, size) laser printer is required to have a tilting error θ of 1 second or less, but measurement is performed using an objective lens 6 with a focal length f of 500 mm. If you decide to do this, the fall error θ for 1 second will be approximately 7 as the distance Δ.
As a practical matter, it is difficult to measure an angular error of 1 second or less. Furthermore, since the rotary table 2 needs to be of high precision and the deflection of the polygon mirror 1 must be measured, it takes time to prepare for the measurement.
そこで、本発明の目的は、測定請度の向上を図りつつ手
軽にポリゴンミラーの反射面の倒れ誤差を測定できるポ
リゴンミラーの反射面の倒れ誤差測定方法を提供するこ
とにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for measuring inclination error of a reflective surface of a polygon mirror, which can easily measure the inclination error of a reflective surface of a polygon mirror while improving measurement reliability.
発明の構成
（問題点を解決するための手段）
本発明に係るポリゴンミラーの反射面の倒れ誤差測定方
法の特徴は、ポリゴンミラーの底面に対する反射面の倒
れ誤差を測定する測定光学系から出射された測定光を、
屈折の法則に従ってポリゴンミラーの底面の対向面より
内部に導き、その底面及び反射面で反射させることによ
って、その底面に対するその反射面の倒れ誤差を測定す
るようにしたところにある。Structure of the Invention (Means for Solving Problems) A feature of the method for measuring the inclination error of the reflective surface of a polygon mirror according to the present invention is that the method for measuring the inclination error of the reflective surface of the polygon mirror with respect to the bottom surface of the polygon mirror is characterized in that a measurement light,
In accordance with the law of refraction, the beam is introduced into the interior of the polygon mirror from the opposite surface of the bottom surface, and is reflected by the bottom surface and the reflective surface, thereby measuring the inclination error of the reflective surface with respect to the bottom surface.
（実施例）
第１図は１本発明に係るポリゴンミラーの底面に対する
反射面の倒れ誤差の測定方法の説明図であって、測定光
学系５としてのオートコリメーター１０をポリゴンミラ
ー１の底面１ｉに対向する対向面１ｊに向けてセットす
る。オートコリメーター１０の対物レンズ６から出射さ
れた測定光Ｐは、対向面１ｊに向かって直進し、ポリゴ
ンミラー１に進入する際に屈折する。ここで、第２図に
示すようにポリゴンミラー１の屈折率をｎとし、Ｐｉを
対物レンズ６の主光軸を通る光線、Ｐ２を対物レンズ１
１の一側位置を通る光線、Ｐ３を対物レンズ６の主光軸
を境にその一側位置と対称な他側位置を通る光線とする
。(Example) FIG. 1 is an explanatory diagram of a method for measuring the inclination error of a reflective surface with respect to the bottom surface of a polygon mirror 1 according to the present invention, in which an autocollimator 10 as a measuring optical system 5 is Set it toward the facing surface 1j facing the. The measurement light P emitted from the objective lens 6 of the autocollimator 10 travels straight toward the opposing surface 1j and is refracted when entering the polygon mirror 1. Here, as shown in FIG. 2, the refractive index of the polygon mirror 1 is n, Pi is the ray passing through the main optical axis of the objective lens 6, and P2 is the ray passing through the main optical axis of the objective lens 1.
Let P3 be a ray of light that passes through a position on one side of objective lens 6, and a ray of light that passes through a position on the other side that is symmetrical to the position on one side with the main optical axis of objective lens 6 as a boundary.
光線Ｐ１、Ｐ、、Ｐ、の入射角をｉ、屈折角をｒとする
と、入射角ｉ、屈折角ｒをラジアン単位で表すとすると
、
ｓｉｎ ｉ ＝ ｎ ｊｓｉｎ ｒ ・・・■
ここで、たとえば、光線Ｐ、に着目し、その光線Ｐ、の
屈折光をＰ３いその屈折光Ｐ０の底面１１による反射光
をＰ１３．その反射光Ｐ３２の反射面１ａによる反射光
をＰ３．とすると、反射面１ａが底面１ｉに対して直角
の場合には、底面１ｉで反射された反射光Ｐ３２がその
反射面１ａに立てた法線に対して為す入射角と反射光Ｐ
３３が反射面１１に立てた法線に対して為す反射角とは
、それぞれ屈折角ｒに等しいが、反射面１ａの倒れ誤差
が底面１１に対してθであるとすると、底面１１で反射
された反射光Ｐ、２がその反射面１ａに立てた法線Ｍに
対して為す入射角と反射光Ｐ３．がその反射面１ａに立
てた法線Ｍに対して為す反射角とは、それぞれｒ−θで
ある。If the incident angle of the rays P1, P, ,P is i and the refraction angle is r, then if the incident angle i and the refraction angle r are expressed in radians, then sin i = n jsin r...■
Here, for example, focusing on the light ray P, the refracted light of the light ray P is P3, and the reflected light of the refracted light P0 by the bottom surface 11 is P13. The reflected light P32 is reflected by the reflecting surface 1a as P3. Then, when the reflective surface 1a is perpendicular to the bottom surface 1i, the incident angle of the reflected light P32 reflected by the bottom surface 1i with respect to the normal to the reflective surface 1a and the reflected light P
The angle of reflection that 33 makes with respect to the normal to the reflecting surface 11 is equal to the refraction angle r, but if the tilting error of the reflecting surface 1a is θ with respect to the bottom surface 11, then the reflection angle at the bottom surface 11 is The incident angle that the reflected light P,2 makes with respect to the normal M set on the reflecting surface 1a and the reflected light P3. The angle of reflection made by the normal M to the reflecting surface 1a is r-θ.
その反射面１ａで反射された反射光Ｐ３．が対向面１ｊ
に立てた法線Ｍ′に対して為す入射角Ｘは１反射面１ａ
が底面１１に対して直角である場合には、屈折角ｒに等
しく、かつ、その出射光Ｐ、′の出射角ｉ′は光線Ｐ３
の入射角ｉに等しいが、反射面１ａの倒れ誤差が底面１
１に対してθであるとすると、その反射面１ａで反射さ
れた反射光Ｐ、３が対向面１ｊに立てた法線Ｍ′に対し
て為す入射角又は、ｒ−２０となり、
ｓｉｎ ｉ ’ ＝ ｎ ＋５ｉｎＸ
＝ｎ （ｓｉｎｒ ＠ｃｏｓ２０−ｃｏｓｒ １ｓｉｎ
２０）ここで、一般にθは微小角であるため、５ｉｎｉ
’ ＝ｎ ｌｌ５ｉｎｒ−２ｎｏ” ｃｏｓ ｒ＝ｓ
ｉｎｉ−２ｎθ魯ｃｏｓｒ
＝ｓｉｎｉ−２ｎｏ・ｆ丁−５ｉｎｉ／ｎ）”したがっ
て。Reflected light P3 reflected by the reflective surface 1a. is the opposite surface 1j
The angle of incidence X made with respect to the normal M' set on 1 reflection surface 1a
is perpendicular to the bottom surface 11, it is equal to the refraction angle r, and the output angle i' of the output light P,' is equal to the ray P3
is equal to the incident angle i, but the inclination error of the reflective surface 1a is equal to the angle of incidence i
1, then the incident angle of the reflected light P, 3 reflected by the reflecting surface 1a with respect to the normal M' set on the opposing surface 1j, or r-20, is sin i' = n +5inX =n (sinr @cos20-cosr 1sin
20) Here, since θ is generally a small angle, 5 ini
'=n ll5inr-2no" cos r=s
therefore.
ｉ ’ ＝ｓｉｎ−１［ｓｉｎ ｉ −２ｎθｆ丁−５
ｉｎｉ／ｎ） ’Ｊよって、入射角ｉが小さいときには
、出射光Ｐ、′の出射角ｉ′は、
ｉ ’＝ｉ−２ｎｏ・・・■
となる。i' = sin-1[sin i-2nθf-5
ini/n) 'J Therefore, when the incident angle i is small, the output angle i' of the output lights P and ' is as follows: i'=i-2no...■.
すなわち、出射角ｉ′は、倒れ誤差０が０度であるとし
た場合の出射角ｉに対して２ｎＯ異なり、出射光Ｐ３′
は倒れ誤差θが０度の場合の出射光Ｐ、′の出射方向に
対して２ｎθ異なる方向に出射される。この第２図に示
す例の場合には、光線Ｐ４の出射光Ｐ１′も同様の方向
に出射される。That is, the output angle i' differs by 2nO from the output angle i when the tilt error is 0 degrees, and the output light P3'
is emitted in a direction different by 2nθ from the emission direction of the emitted light P,' when the tilting error θ is 0 degrees. In the case of the example shown in FIG. 2, the emitted light P1' of the light beam P4 is also emitted in the same direction.
光線Ｐ、に着目すると、その屈折光Ｐ２□は、まず、反
射面１ａで反射され、その反射光Ｐ２２は、次に底面１
１で反射され、その反射光Ｐ２３は屈折して出射光Ｐ２
′として、対向面１ｊから出射される。Focusing on the light ray P, its refracted light P2□ is first reflected on the reflective surface 1a, and then the reflected light P22 is reflected on the bottom surface 1.
1, the reflected light P23 is refracted and becomes the output light P2.
' is emitted from the opposing surface 1j.
その出射光Ｐ２′の出射角ｉ′は、倒れ誤差０が０度で
あるとした場合の出射角ｉに対して出射光Ｐ、′の場合
とは反対方向に２ｎ（ｌだけ異なる。The output angle i' of the output light P2' is different from the output angle i when the tilt error is 0 degrees by 2n(l) in the opposite direction from that of the output light P,'.
すなわち、対物レンズ６の主光軸を境に一側位置から出
射されてポリゴンミラー１の内部を通って対向面１ｊか
ら出射された出射光線とその他側位置から出射されてポ
リゴンミラー１の内部を通って対向面１ｊから出射され
た出射光線とは互いに離反する方向に出射され、その出
射方向が相反する光線はそれぞれ対物レンズ６に導かれ
て焦点ガラスＧ２上に別々に結像されることになり、結
果として、第３図に示すように焦点ガラスＧ１のマーク
の像Ｚがスプリットして焦点ガラスＧ２上に形成される
ことになる。That is, with the principal optical axis of the objective lens 6 as a boundary, there is an emitted light beam that is emitted from one side, passes through the inside of the polygon mirror 1, and is emitted from the opposing surface 1j, and an emitted light beam that is emitted from the other side and passes through the inside of the polygon mirror 1. The outgoing light rays emitted from the opposing surface 1j are emitted in directions away from each other, and the light rays whose outgoing directions are opposite to each other are guided to the objective lens 6 and imaged separately on the focusing glass G2. As a result, as shown in FIG. 3, the image Z of the mark on the focusing glass G1 is split and formed on the focusing glass G2.
そのマークの像Ｚのスプリット幅Ｔは、焦点ガラスＧ２
の十字線の交点０１からの距離をΔとすると、
Ｔ＝２Δ−４ｎθ
である。The split width T of the mark image Z is the focusing glass G2.
Letting Δ be the distance from the intersection 01 of the crosshairs, T=2Δ−4nθ.
よって、接眼レンズＥを除いて、そのスプリット幅Ｔを
測定すれば、倒れ誤差０を測定できることになり、その
測定精度は、ポリゴンミラー１の材料の屈折率ｎを１．
５とすれば、６ｆＯとなり、本発明に係るポリゴンミラ
ーの反射面の倒れ誤差の測定方法によれば、従来に較べ
て測定精度が３倍に向上する。Therefore, if the split width T is measured excluding the eyepiece E, the tilting error can be measured to be 0, and the measurement accuracy is as follows: If the refractive index n of the material of the polygon mirror 1 is 1.
5, it becomes 6fO, and according to the method for measuring the inclination error of the reflective surface of a polygon mirror according to the present invention, the measurement accuracy is improved three times compared to the conventional method.
また、本発明に係るポリゴンミラーの反射面の倒れ誤差
測定方法によれば、測定用定盤にポリゴンミラー１を載
置し、オートコリメータによってスプリットの像２を＠
＊するようにすれば、倒れ誤差０の測定ができるので、
従来の８１１定方法のように面倒な測定準備を行なう必
要がなく手軽に測定を行なうことができる。Further, according to the method for measuring inclination error of a reflective surface of a polygon mirror according to the present invention, the polygon mirror 1 is placed on a measurement surface plate, and the split image 2 is
*If you do this, you can measure with zero fall error, so
Unlike the conventional 811 determination method, there is no need to make troublesome measurement preparations, and the measurement can be easily performed.
なお、以上、実施例においては、本発明に係る測定方法
をオートコリメータを用いて測定を行なう方法に適用し
た場合について説明したが、本発明に係る測定方法はフ
ィゾー干渉計等の干渉計を用いて測定を行なう場合にも
適用できるものである。In addition, in the examples above, the case where the measurement method according to the present invention is applied to a method of performing measurement using an autocollimator has been explained, but the measurement method according to the present invention is also applicable to a method using an interferometer such as a Fizeau interferometer. It can also be applied when measurements are made.
発明の効果
本発明に係るポリゴンミラーの反射面の倒れ誤差測定方
法の特徴は、ポリゴンミラーの底面に対する反射面の倒
れ誤差を測定する測定光学系から出射された測定光を、
屈折の法則に従ってポリゴンミラーの底面の対向面より
内部に導き、その底面及び反射面で反射させることによ
って、その底面に対するその反射面の倒れ誤差を測定す
るようにしたから、測定精度の向上を図りつつ手軽にポ
リゴンミラーの反射面の倒れ誤差を測定できるという効
果を奏する。Effects of the Invention The feature of the method for measuring the tilting error of the reflective surface of a polygon mirror according to the present invention is that the measurement light emitted from the measurement optical system for measuring the tilting error of the reflective surface with respect to the bottom surface of the polygon mirror is
In accordance with the law of refraction, the light is introduced into the interior from the opposite surface of the bottom of the polygon mirror, and is reflected by the bottom and the reflective surface to measure the error in the inclination of the reflective surface with respect to the bottom, which improves measurement accuracy. This has the effect of easily measuring the inclination error of the reflective surface of the polygon mirror.
第１図は本発明に係るポリゴンミラーの反射面の倒れ誤
差測定方法の一例を示す図、第２図はその第１図に示す
測定光の反射屈折状態を示すポリゴンミラーの部分拡大
図、第３図は第１図に示すオートコリメータ＼の焦点ガ
ラ♂上での結像状態を示す図、第４図はポリゴンミラー
の平面図、第５図は従来のポリゴンミラーの反射面の倒
れ誤差の測定方法の説明図、第６図は第５図に示すオー
トコリメータの測定原理を説明するための説明図である
。
１・・・ポリゴンミラー
１ａ＝１ｈ・・・反射面
１１・・・底面
θ・・・倒れ誤差
Ｐ・・・測定光
５・・・測定光学系
６・・・対物レンズ
ｉ・・・入射角
ｒ・・・屈折角
ｎ・・・屈折率
Ｇ工、Ｇ２・・・焦点ガラス
第１図
第２図
第３図
第４屈
ｆ
第５図
第６図
手 続 補 正 書 （自発）昭和６３年 ２
月 ５８゜
特許庁長官 殿 −１、事件
の表示
特願昭６２−１０８８４号
一０発明の名称
ポリゴンミラーの反射面の倒れ誤差測定方法３、補正を
する者
事件との関係 特許出願人
住所 東京都板橋区前野町２丁目３６番９号〒１７４電
話０３−９６０−５１６２
ダ、補正の対象
（１）明細書の「発明の詳細な説明」の欄（２）図面
一＼、
ｊ、補正の内容
（１）明則書第４頁第６行の
「Δ＝２・ｆ・θ」を
「Δ畔２・ｆ・θ」と補正する。
（２）同書第７頁第１４行の
「ｒ−θ」を
（３）同書第１０頁第５行の
「除いて」を
「覗いて」と補正する。
（４）図面の「第２図」を別紙訂正図面「第２Ｖのとお
り補正する。
！Ｌ肩正口ＱＩ］］
第２図FIG. 1 is a diagram showing an example of a method for measuring inclination error of a reflective surface of a polygon mirror according to the present invention, and FIG. 2 is a partially enlarged view of the polygon mirror showing the catadioptric state of the measurement light shown in FIG. Figure 3 shows the state of image formation on the focal glass of the autocollimator shown in Figure 1, Figure 4 is a plan view of the polygon mirror, and Figure 5 shows the tilting error of the reflective surface of a conventional polygon mirror. FIG. 6 is an explanatory diagram for explaining the measurement principle of the autocollimator shown in FIG. 5. 1... Polygon mirror 1a=1h... Reflection surface 11... Bottom surface θ... Inclination error P... Measurement light 5... Measurement optical system 6... Objective lens i... Incident angle r...Angle of refraction n...Refractive index G, G2...Focus glass Figure 1 Figure 2 Figure 3 Figure 4 Refraction f Figure 5 Figure 6 Procedure Amendment (Spontaneous) 1982 year 2
Month 58゜To the Commissioner of the Japan Patent Office - 1. Indication of the case Japanese Patent Application No. 10884/1988 10 Name of the invention Method for measuring inclination error of the reflective surface of a polygon mirror 3. Person making the correction Relationship with the case Patent applicant address Tokyo 2-36-9 Maeno-cho, Itabashi-ku, Miyako 174 Phone: 03-960-5162 Subject of amendment (1) “Detailed description of the invention” column of the specification (2) Drawings 1\, j, Amendment Contents (1) "Δ=2・f・θ" in the 6th line of page 4 of the Meijōsho is corrected to "Δ畔2・f・θ". (2) "r-θ" on page 7, line 14 of the same book; (3) "except" on page 10, line 5 of the same book is corrected to "peek". (4) The “Figure 2” of the drawing is corrected as shown in the attached corrected drawing “No. 2V. !L Shoulder Front Exit QI]] Figure 2
Claims (1)
を測定する測定光学系から出射された測定光を、屈折の
法則に従って前記ポリゴンミラーの底面の対向面より内
部に導き、前記底面及び反射面で反射させることによっ
て、前記底面に対する前記反射面の倒れ誤差を測定する
ことを特徴とするポリゴンミラーの反射面の倒れ誤差測
定方法。(1) Measurement light emitted from the measurement optical system that measures the inclination error of the reflective surface with respect to the bottom surface of the polygon mirror is guided inside from the opposite surface of the bottom surface of the polygon mirror according to the law of refraction, and A method for measuring a tilting error of a reflective surface of a polygon mirror, comprising measuring a tilting error of the reflective surface with respect to the bottom surface by reflecting the reflective surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1088487A JPS63179314A (en) | 1987-01-20 | 1987-01-20 | Measuring method for inclination error of reflecting surface of polygon mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1088487A JPS63179314A (en) | 1987-01-20 | 1987-01-20 | Measuring method for inclination error of reflecting surface of polygon mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63179314A true JPS63179314A (en) | 1988-07-23 |
Family
ID=11762742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1088487A Pending JPS63179314A (en) | 1987-01-20 | 1987-01-20 | Measuring method for inclination error of reflecting surface of polygon mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63179314A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002138613A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
| JP2002138614A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
| JP2002138604A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6044811A (en) * | 1983-08-22 | 1985-03-11 | Onoda Cement Co Ltd | Method for measuring angle of end part of plate shaped material |
| JPS61227277A (en) * | 1985-04-01 | 1986-10-09 | マグネテイツク ペリフエラルズ インコ−ポレ−テツド | Calibration reference apparatus and manufacture thereof |
-
1987
- 1987-01-20 JP JP1088487A patent/JPS63179314A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6044811A (en) * | 1983-08-22 | 1985-03-11 | Onoda Cement Co Ltd | Method for measuring angle of end part of plate shaped material |
| JPS61227277A (en) * | 1985-04-01 | 1986-10-09 | マグネテイツク ペリフエラルズ インコ−ポレ−テツド | Calibration reference apparatus and manufacture thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002138613A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
| JP2002138614A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
| JP2002138604A (en) * | 2000-11-01 | 2002-05-17 | Okamura Corp | Partition device |
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