JPS63178334U - - Google Patents

Info

Publication number
JPS63178334U
JPS63178334U JP6979387U JP6979387U JPS63178334U JP S63178334 U JPS63178334 U JP S63178334U JP 6979387 U JP6979387 U JP 6979387U JP 6979387 U JP6979387 U JP 6979387U JP S63178334 U JPS63178334 U JP S63178334U
Authority
JP
Japan
Prior art keywords
holder
sample
intermediate material
hole
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6979387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6979387U priority Critical patent/JPS63178334U/ja
Publication of JPS63178334U publication Critical patent/JPS63178334U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP6979387U 1987-05-11 1987-05-11 Pending JPS63178334U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6979387U JPS63178334U (US08063081-20111122-C00115.png) 1987-05-11 1987-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6979387U JPS63178334U (US08063081-20111122-C00115.png) 1987-05-11 1987-05-11

Publications (1)

Publication Number Publication Date
JPS63178334U true JPS63178334U (US08063081-20111122-C00115.png) 1988-11-18

Family

ID=30910844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6979387U Pending JPS63178334U (US08063081-20111122-C00115.png) 1987-05-11 1987-05-11

Country Status (1)

Country Link
JP (1) JPS63178334U (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0533135A (ja) * 1991-07-31 1993-02-09 Shibaura Eng Works Co Ltd 吸着機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0533135A (ja) * 1991-07-31 1993-02-09 Shibaura Eng Works Co Ltd 吸着機構

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