JPS63178329U - - Google Patents
Info
- Publication number
- JPS63178329U JPS63178329U JP4953588U JP4953588U JPS63178329U JP S63178329 U JPS63178329 U JP S63178329U JP 4953588 U JP4953588 U JP 4953588U JP 4953588 U JP4953588 U JP 4953588U JP S63178329 U JPS63178329 U JP S63178329U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- screw shaft
- reciprocates
- screw
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4953588U JPS63178329U (enFirst) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4953588U JPS63178329U (enFirst) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178329U true JPS63178329U (enFirst) | 1988-11-18 |
Family
ID=30872075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4953588U Pending JPS63178329U (enFirst) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178329U (enFirst) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941291A (enFirst) * | 1972-08-28 | 1974-04-18 | ||
| JPS513743U (enFirst) * | 1974-06-25 | 1976-01-12 | ||
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
-
1988
- 1988-04-13 JP JP4953588U patent/JPS63178329U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941291A (enFirst) * | 1972-08-28 | 1974-04-18 | ||
| JPS513743U (enFirst) * | 1974-06-25 | 1976-01-12 | ||
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
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