JPS63178327U - - Google Patents

Info

Publication number
JPS63178327U
JPS63178327U JP7007387U JP7007387U JPS63178327U JP S63178327 U JPS63178327 U JP S63178327U JP 7007387 U JP7007387 U JP 7007387U JP 7007387 U JP7007387 U JP 7007387U JP S63178327 U JPS63178327 U JP S63178327U
Authority
JP
Japan
Prior art keywords
probe card
probe
groove
electrically connected
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7007387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058681Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987070073U priority Critical patent/JPH058681Y2/ja
Publication of JPS63178327U publication Critical patent/JPS63178327U/ja
Application granted granted Critical
Publication of JPH058681Y2 publication Critical patent/JPH058681Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987070073U 1987-05-11 1987-05-11 Expired - Lifetime JPH058681Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987070073U JPH058681Y2 (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987070073U JPH058681Y2 (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Publications (2)

Publication Number Publication Date
JPS63178327U true JPS63178327U (enrdf_load_stackoverflow) 1988-11-18
JPH058681Y2 JPH058681Y2 (enrdf_load_stackoverflow) 1993-03-04

Family

ID=30911374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987070073U Expired - Lifetime JPH058681Y2 (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Country Status (1)

Country Link
JP (1) JPH058681Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390837U (enrdf_load_stackoverflow) * 1986-12-03 1988-06-13
JPS63244750A (ja) * 1987-03-31 1988-10-12 Tokyo Electron Ltd プロ−ブカ−ドおよびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390837U (enrdf_load_stackoverflow) * 1986-12-03 1988-06-13
JPS63244750A (ja) * 1987-03-31 1988-10-12 Tokyo Electron Ltd プロ−ブカ−ドおよびその製造方法

Also Published As

Publication number Publication date
JPH058681Y2 (enrdf_load_stackoverflow) 1993-03-04

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