JPS63177998U - - Google Patents

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Publication number
JPS63177998U
JPS63177998U JP6850287U JP6850287U JPS63177998U JP S63177998 U JPS63177998 U JP S63177998U JP 6850287 U JP6850287 U JP 6850287U JP 6850287 U JP6850287 U JP 6850287U JP S63177998 U JPS63177998 U JP S63177998U
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JP
Japan
Prior art keywords
manipulated variable
actuator
target
target value
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6850287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322320Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987068502U priority Critical patent/JPH0322320Y2/ja
Publication of JPS63177998U publication Critical patent/JPS63177998U/ja
Application granted granted Critical
Publication of JPH0322320Y2 publication Critical patent/JPH0322320Y2/ja
Expired legal-status Critical Current

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  • Paper (AREA)
  • Feedback Control In General (AREA)
JP1987068502U 1987-05-08 1987-05-08 Expired JPH0322320Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987068502U JPH0322320Y2 (enExample) 1987-05-08 1987-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987068502U JPH0322320Y2 (enExample) 1987-05-08 1987-05-08

Publications (2)

Publication Number Publication Date
JPS63177998U true JPS63177998U (enExample) 1988-11-17
JPH0322320Y2 JPH0322320Y2 (enExample) 1991-05-15

Family

ID=30908375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987068502U Expired JPH0322320Y2 (enExample) 1987-05-08 1987-05-08

Country Status (1)

Country Link
JP (1) JPH0322320Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI681855B (zh) * 2016-08-31 2020-01-11 日商精工愛普生股份有限公司 片材製造裝置及片材製造裝置之控制方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157395A (ja) * 1983-02-18 1984-09-06 三菱重工業株式会社 制御方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157395A (ja) * 1983-02-18 1984-09-06 三菱重工業株式会社 制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI681855B (zh) * 2016-08-31 2020-01-11 日商精工愛普生股份有限公司 片材製造裝置及片材製造裝置之控制方法

Also Published As

Publication number Publication date
JPH0322320Y2 (enExample) 1991-05-15

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