JPS63177955U - - Google Patents
Info
- Publication number
- JPS63177955U JPS63177955U JP6999887U JP6999887U JPS63177955U JP S63177955 U JPS63177955 U JP S63177955U JP 6999887 U JP6999887 U JP 6999887U JP 6999887 U JP6999887 U JP 6999887U JP S63177955 U JPS63177955 U JP S63177955U
- Authority
- JP
- Japan
- Prior art keywords
- carousel
- target electrode
- utility
- moving mechanism
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6999887U JPS63177955U (enExample) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6999887U JPS63177955U (enExample) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177955U true JPS63177955U (enExample) | 1988-11-17 |
Family
ID=30911231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6999887U Pending JPS63177955U (enExample) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177955U (enExample) |
-
1987
- 1987-05-11 JP JP6999887U patent/JPS63177955U/ja active Pending