JPS63177954U - - Google Patents

Info

Publication number
JPS63177954U
JPS63177954U JP6983887U JP6983887U JPS63177954U JP S63177954 U JPS63177954 U JP S63177954U JP 6983887 U JP6983887 U JP 6983887U JP 6983887 U JP6983887 U JP 6983887U JP S63177954 U JPS63177954 U JP S63177954U
Authority
JP
Japan
Prior art keywords
target electrode
vacuum
rod
substrate holder
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6983887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6983887U priority Critical patent/JPS63177954U/ja
Publication of JPS63177954U publication Critical patent/JPS63177954U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6983887U 1987-05-11 1987-05-11 Pending JPS63177954U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6983887U JPS63177954U (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6983887U JPS63177954U (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Publications (1)

Publication Number Publication Date
JPS63177954U true JPS63177954U (enrdf_load_stackoverflow) 1988-11-17

Family

ID=30910925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6983887U Pending JPS63177954U (enrdf_load_stackoverflow) 1987-05-11 1987-05-11

Country Status (1)

Country Link
JP (1) JPS63177954U (enrdf_load_stackoverflow)

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