JPS63177683U - - Google Patents
Info
- Publication number
- JPS63177683U JPS63177683U JP6680687U JP6680687U JPS63177683U JP S63177683 U JPS63177683 U JP S63177683U JP 6680687 U JP6680687 U JP 6680687U JP 6680687 U JP6680687 U JP 6680687U JP S63177683 U JPS63177683 U JP S63177683U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- vacuum
- detection section
- function
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000004092 self-diagnosis Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6680687U JPS63177683U (da) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6680687U JPS63177683U (da) | 1987-05-06 | 1987-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177683U true JPS63177683U (da) | 1988-11-17 |
Family
ID=30905144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6680687U Pending JPS63177683U (da) | 1987-05-06 | 1987-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177683U (da) |
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1987
- 1987-05-06 JP JP6680687U patent/JPS63177683U/ja active Pending