JPS63177683U - - Google Patents
Info
- Publication number
- JPS63177683U JPS63177683U JP6680687U JP6680687U JPS63177683U JP S63177683 U JPS63177683 U JP S63177683U JP 6680687 U JP6680687 U JP 6680687U JP 6680687 U JP6680687 U JP 6680687U JP S63177683 U JPS63177683 U JP S63177683U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- vacuum
- detection section
- function
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000004092 self-diagnosis Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第1図は本考案に係る自己診断機能付真空ポン
プを模式的に描いた説明図である。
1……真空ポンプ、1a……ポンプ部、1b…
…真空吸引管、1c……排気管、2……真空セン
サ、3……検出部、4……表示部、5……警報器
。
FIG. 1 is an explanatory diagram schematically depicting a vacuum pump with a self-diagnosis function according to the present invention. 1...Vacuum pump, 1a...Pump section, 1b...
...Vacuum suction pipe, 1c...Exhaust pipe, 2...Vacuum sensor, 3...Detection section, 4...Display section, 5...Alarm device.
Claims (1)
サと、(b)上記真空センサの出力信号を入力され
て上記真空ポンプの機能を判定する検出部と、(c
)上記検出部の判定結果を表示する表示部と、(d)
前記の検出部の判定結果が、予め定められた値以
下である場合に作動する警報器とを設けたことを
特徴とする、自己診断機能付真空ポンプ。 (a) a vacuum sensor provided on the vacuum suction side of the vacuum pump; (b) a detection unit that receives the output signal of the vacuum sensor and determines the function of the vacuum pump; (c)
) a display section that displays the judgment result of the detection section; (d)
A vacuum pump with a self-diagnosis function, characterized in that the vacuum pump is equipped with an alarm that operates when the determination result of the detection section is less than or equal to a predetermined value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6680687U JPS63177683U (en) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6680687U JPS63177683U (en) | 1987-05-06 | 1987-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63177683U true JPS63177683U (en) | 1988-11-17 |
Family
ID=30905144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6680687U Pending JPS63177683U (en) | 1987-05-06 | 1987-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63177683U (en) |
-
1987
- 1987-05-06 JP JP6680687U patent/JPS63177683U/ja active Pending