JPS63177070U - - Google Patents
Info
- Publication number
- JPS63177070U JPS63177070U JP6863687U JP6863687U JPS63177070U JP S63177070 U JPS63177070 U JP S63177070U JP 6863687 U JP6863687 U JP 6863687U JP 6863687 U JP6863687 U JP 6863687U JP S63177070 U JPS63177070 U JP S63177070U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- transmitting member
- mirror
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6863687U JPH0632703Y2 (ja) | 1987-05-08 | 1987-05-08 | レ−ザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6863687U JPH0632703Y2 (ja) | 1987-05-08 | 1987-05-08 | レ−ザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63177070U true JPS63177070U (fr) | 1988-11-16 |
| JPH0632703Y2 JPH0632703Y2 (ja) | 1994-08-24 |
Family
ID=30908636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6863687U Expired - Lifetime JPH0632703Y2 (ja) | 1987-05-08 | 1987-05-08 | レ−ザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632703Y2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004095661A1 (fr) * | 2003-04-22 | 2004-11-04 | Komatsu Ltd. | Dispositif laser a 2 etages pour exposition |
| JP2006203008A (ja) * | 2005-01-21 | 2006-08-03 | Komatsu Ltd | ２ステージレーザシステム |
-
1987
- 1987-05-08 JP JP6863687U patent/JPH0632703Y2/ja not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004095661A1 (fr) * | 2003-04-22 | 2004-11-04 | Komatsu Ltd. | Dispositif laser a 2 etages pour exposition |
| JPWO2004095661A1 (ja) * | 2003-04-22 | 2006-07-13 | 株式会社小松製作所 | 露光用２ステージレーザ装置 |
| JP2009283967A (ja) * | 2003-04-22 | 2009-12-03 | Komatsu Ltd | 露光用２ステージレーザ装置 |
| JP2009283966A (ja) * | 2003-04-22 | 2009-12-03 | Komatsu Ltd | 露光用２ステージレーザ装置 |
| JP2010004053A (ja) * | 2003-04-22 | 2010-01-07 | Komatsu Ltd | 露光用２ステージレーザ装置 |
| JP2010004052A (ja) * | 2003-04-22 | 2010-01-07 | Komatsu Ltd | 露光用２ステージレーザ装置 |
| JP4530302B2 (ja) * | 2003-04-22 | 2010-08-25 | 株式会社小松製作所 | 露光用２ステージレーザ装置 |
| JP4657103B2 (ja) * | 2003-04-22 | 2011-03-23 | 株式会社小松製作所 | 露光用２ステージレーザ装置 |
| JP2006203008A (ja) * | 2005-01-21 | 2006-08-03 | Komatsu Ltd | ２ステージレーザシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632703Y2 (ja) | 1994-08-24 |