JPS63177051U - - Google Patents

Info

Publication number

JPS63177051U

JPS63177051U JP6676387U JP6676387U JPS63177051U JP S63177051 U JPS63177051 U JP S63177051U JP 6676387 U JP6676387 U JP 6676387U JP 6676387 U JP6676387 U JP 6676387U JP S63177051 U JPS63177051 U JP S63177051U

Authority

JP

Japan

Prior art keywords

insulating film

region

depositing

semiconductor device

integrated circuit

Prior art date

1987-05-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000002955 isolation Methods 0.000 claims description 2
• 238000000151 deposition Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1