JPS63177050U - - Google Patents

Info

Publication number
JPS63177050U
JPS63177050U JP6717487U JP6717487U JPS63177050U JP S63177050 U JPS63177050 U JP S63177050U JP 6717487 U JP6717487 U JP 6717487U JP 6717487 U JP6717487 U JP 6717487U JP S63177050 U JPS63177050 U JP S63177050U
Authority
JP
Japan
Prior art keywords
cassette
side plate
support rod
semiconductor substrate
semiconductor substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6717487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6717487U priority Critical patent/JPS63177050U/ja
Publication of JPS63177050U publication Critical patent/JPS63177050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP6717487U 1987-04-30 1987-04-30 Pending JPS63177050U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6717487U JPS63177050U (fi) 1987-04-30 1987-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6717487U JPS63177050U (fi) 1987-04-30 1987-04-30

Publications (1)

Publication Number Publication Date
JPS63177050U true JPS63177050U (fi) 1988-11-16

Family

ID=30905841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6717487U Pending JPS63177050U (fi) 1987-04-30 1987-04-30

Country Status (1)

Country Link
JP (1) JPS63177050U (fi)

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