JPS63177050U - - Google Patents
Info
- Publication number
- JPS63177050U JPS63177050U JP6717487U JP6717487U JPS63177050U JP S63177050 U JPS63177050 U JP S63177050U JP 6717487 U JP6717487 U JP 6717487U JP 6717487 U JP6717487 U JP 6717487U JP S63177050 U JPS63177050 U JP S63177050U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- side plate
- support rod
- semiconductor substrate
- semiconductor substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6717487U JPS63177050U (fi) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6717487U JPS63177050U (fi) | 1987-04-30 | 1987-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63177050U true JPS63177050U (fi) | 1988-11-16 |
Family
ID=30905841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6717487U Pending JPS63177050U (fi) | 1987-04-30 | 1987-04-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63177050U (fi) |
-
1987
- 1987-04-30 JP JP6717487U patent/JPS63177050U/ja active Pending
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