JPS63176578U - - Google Patents

Info

Publication number
JPS63176578U
JPS63176578U JP3603887U JP3603887U JPS63176578U JP S63176578 U JPS63176578 U JP S63176578U JP 3603887 U JP3603887 U JP 3603887U JP 3603887 U JP3603887 U JP 3603887U JP S63176578 U JPS63176578 U JP S63176578U
Authority
JP
Japan
Prior art keywords
disk
coating liquid
held
ultraviolet irradiation
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3603887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3603887U priority Critical patent/JPS63176578U/ja
Publication of JPS63176578U publication Critical patent/JPS63176578U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3603887U 1987-03-12 1987-03-12 Pending JPS63176578U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3603887U JPS63176578U (enExample) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3603887U JPS63176578U (enExample) 1987-03-12 1987-03-12

Publications (1)

Publication Number Publication Date
JPS63176578U true JPS63176578U (enExample) 1988-11-16

Family

ID=30846077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3603887U Pending JPS63176578U (enExample) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPS63176578U (enExample)

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