JPS63176061U - - Google Patents
Info
- Publication number
- JPS63176061U JPS63176061U JP1986180644U JP18064486U JPS63176061U JP S63176061 U JPS63176061 U JP S63176061U JP 1986180644 U JP1986180644 U JP 1986180644U JP 18064486 U JP18064486 U JP 18064486U JP S63176061 U JPS63176061 U JP S63176061U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- dressing device
- large number
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 229910001111 Fine metal Inorganic materials 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180644U JPS63176061U (ko) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180644U JPS63176061U (ko) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176061U true JPS63176061U (ko) | 1988-11-15 |
Family
ID=31124790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180644U Pending JPS63176061U (ko) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176061U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128879A (ja) * | 2008-02-29 | 2014-07-10 | Tokyo Seimitsu Co Ltd | パッドドレッサー及びパッドドレッシング方法 |
| JP2017087407A (ja) * | 2015-11-17 | 2017-05-25 | アルバック成膜株式会社 | 研磨方法、研磨装置 |
-
1986
- 1986-11-25 JP JP1986180644U patent/JPS63176061U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128879A (ja) * | 2008-02-29 | 2014-07-10 | Tokyo Seimitsu Co Ltd | パッドドレッサー及びパッドドレッシング方法 |
| JP2017087407A (ja) * | 2015-11-17 | 2017-05-25 | アルバック成膜株式会社 | 研磨方法、研磨装置 |