JPS63176061U - - Google Patents
Info
- Publication number
- JPS63176061U JPS63176061U JP1986180644U JP18064486U JPS63176061U JP S63176061 U JPS63176061 U JP S63176061U JP 1986180644 U JP1986180644 U JP 1986180644U JP 18064486 U JP18064486 U JP 18064486U JP S63176061 U JPS63176061 U JP S63176061U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- dressing device
- large number
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 229910001111 Fine metal Inorganic materials 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
第１図は本考案の一実施例に係る研磨シート用
ドレス装置とこのドレス装置を研磨装置にセツテ
イングした状態を示す一部平面図、第２図は第１
図のＡ―Ａ′断面図、第３図は上記ドレス装置の
ブラシの埋め込み態様の一例を示す説明図、第４
図は第３図のＢ―Ｂ′断面図である。
１…ドレツサー本体、２…樹脂系基板、３…ブ
ラシ、４…内歯車、５…外歯車、６…下定盤、７
…研磨シート。
FIG. 1 is a partial plan view showing an abrasive sheet dressing device according to an embodiment of the present invention and a state in which this dressing device is set in a polishing device, and FIG.
3 is an explanatory view showing an example of the manner in which the brush is embedded in the dressing device, and FIG.
The figure is a sectional view taken along line BB' in FIG. 1...Dresser body, 2...Resin base plate, 3...Brush, 4...Internal gear, 5...External gear, 6...Lower surface plate, 7
...Abrasive sheet.
Claims (1)
基板に化学繊維又は金属細線をブラシ状に多数立
植してなる回転ブラシ体からなることを特徴とす
る研磨シートのドレス装置。 1. A polishing sheet dressing device comprising a rotating brush body comprising a resin substrate attached to a rotatable dresser body and a large number of chemical fibers or fine metal wires planted in the form of a brush.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180644U JPS63176061U (en) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180644U JPS63176061U (en) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176061U true JPS63176061U (en) | 1988-11-15 |
Family
ID=31124790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180644U Pending JPS63176061U (en) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176061U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128879A (en) * | 2008-02-29 | 2014-07-10 | Tokyo Seimitsu Co Ltd | Pad dresser and pad dressing method |
| JP2017087407A (en) * | 2015-11-17 | 2017-05-25 | アルバック成膜株式会社 | Polishing method and polishing device |
-
1986
- 1986-11-25 JP JP1986180644U patent/JPS63176061U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128879A (en) * | 2008-02-29 | 2014-07-10 | Tokyo Seimitsu Co Ltd | Pad dresser and pad dressing method |
| JP2017087407A (en) * | 2015-11-17 | 2017-05-25 | アルバック成膜株式会社 | Polishing method and polishing device |