JPS63175852U - - Google Patents

Info

Publication number
JPS63175852U
JPS63175852U JP3477187U JP3477187U JPS63175852U JP S63175852 U JPS63175852 U JP S63175852U JP 3477187 U JP3477187 U JP 3477187U JP 3477187 U JP3477187 U JP 3477187U JP S63175852 U JPS63175852 U JP S63175852U
Authority
JP
Japan
Prior art keywords
laser beam
objective lens
guide tube
light guide
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3477187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3477187U priority Critical patent/JPS63175852U/ja
Publication of JPS63175852U publication Critical patent/JPS63175852U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP3477187U 1987-03-10 1987-03-10 Pending JPS63175852U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3477187U JPS63175852U (enrdf_load_stackoverflow) 1987-03-10 1987-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3477187U JPS63175852U (enrdf_load_stackoverflow) 1987-03-10 1987-03-10

Publications (1)

Publication Number Publication Date
JPS63175852U true JPS63175852U (enrdf_load_stackoverflow) 1988-11-15

Family

ID=30843635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3477187U Pending JPS63175852U (enrdf_load_stackoverflow) 1987-03-10 1987-03-10

Country Status (1)

Country Link
JP (1) JPS63175852U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JP2613118B2 (ja) 共焦点走査型顕微鏡
JPS63175852U (enrdf_load_stackoverflow)
JP2003307681A (ja) 共焦点走査型光学顕微鏡
JPS63180810A (ja) 高さ検出方式
JPS645220U (enrdf_load_stackoverflow)
JPS6378915U (enrdf_load_stackoverflow)
JPS58105528U (ja) 自動合焦装置
JPH03100833U (enrdf_load_stackoverflow)
JPH0174547U (enrdf_load_stackoverflow)
JPS6138506A (ja) 干渉計測機におけるフオ−カシングポイント判別方法
JPS60112211U (ja) 自動合焦装置
JPS61132530U (enrdf_load_stackoverflow)
JPS6398516U (enrdf_load_stackoverflow)
JPH01138212U (enrdf_load_stackoverflow)
JPS6351308U (enrdf_load_stackoverflow)
JPS6419910U (enrdf_load_stackoverflow)
JPS6418423U (enrdf_load_stackoverflow)
JPH01121120U (enrdf_load_stackoverflow)
JPH0378230U (enrdf_load_stackoverflow)
JPS60102605U (ja) 光点位置測定装置
JPH0236813U (enrdf_load_stackoverflow)
JPS6232768B2 (enrdf_load_stackoverflow)
JPS60102606U (ja) 光点位置測定装置
JPH0441651U (enrdf_load_stackoverflow)
JPH02126111U (enrdf_load_stackoverflow)