JPS63175829U - - Google Patents
Info
- Publication number
- JPS63175829U JPS63175829U JP6676987U JP6676987U JPS63175829U JP S63175829 U JPS63175829 U JP S63175829U JP 6676987 U JP6676987 U JP 6676987U JP 6676987 U JP6676987 U JP 6676987U JP S63175829 U JPS63175829 U JP S63175829U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- switch means
- measuring device
- selecting
- temperature measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 8
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
第１図はこの考案の実施例による温度測定装置
を示す回路図、第２図は熱電対が断線していない
ときのバーンアウト検出回路図、第３図は熱電対
が断線しているときのバーンアウト検出回路図、
第４図はこの考案の他の実施例による温度測定装
置を示す回路図、第５図乃至第７図はバーンアウ
ト検出回路の変形例を示す回路図、第８図は従来
の温度測定装置の回路図である。
１〜３，１９は熱電対、４，１２は第１、第２
のスイツチ手段（マルチプレクサ）、１１は信号
処理回路、１３はバーンアウト検出回路、１６は
中央処理装置、１９は切換スイツチ。
Fig. 1 is a circuit diagram showing a temperature measuring device according to an embodiment of this invention, Fig. 2 is a burnout detection circuit diagram when the thermocouple is not disconnected, and Fig. 3 is a circuit diagram showing the burnout detection circuit when the thermocouple is disconnected. burnout detection circuit diagram,
FIG. 4 is a circuit diagram showing a temperature measuring device according to another embodiment of the invention, FIGS. 5 to 7 are circuit diagrams showing modifications of the burnout detection circuit, and FIG. 8 is a circuit diagram showing a conventional temperature measuring device. It is a circuit diagram. 1 to 3, 19 are thermocouples, 4, 12 are first and second
11 is a signal processing circuit, 13 is a burnout detection circuit, 16 is a central processing unit, and 19 is a changeover switch.
Claims (1)
上の熱電対と、これらの熱電対を選択する第１の
スイツチ手段と、この第１のスイツチ手段により
選択された前記熱電対の出力に重畳するノイズを
除去すべく接続されるフイルタ回路と、このフイ
ルタ回路の出力から前記熱電対の測定温度を求め
る信号処理装置を有する温度測定装置において、
前記熱電対を選択する第２のスイツチ手段と、こ
の第２のスイツチ手段により選択された前記熱電
対の断線の有無を検出するバーンアウト検出回路
を備え、前記第１のスイツチ手段と前記第２のス
イツチ手段とが同時に同じ前記熱電対を選択しな
いように構成したことを特徴とする温度測定装置
。 At least one or more thermocouples provided to measure temperature, a first switch means for selecting these thermocouples, and a noise superimposed on the output of the thermocouple selected by the first switch means. A temperature measuring device having a filter circuit connected to remove the thermocouple and a signal processing device for determining the measured temperature of the thermocouple from the output of the filter circuit,
A second switch means for selecting the thermocouple, and a burnout detection circuit for detecting the presence or absence of disconnection of the thermocouple selected by the second switch means, the first switch means and the second switch means A temperature measuring device characterized in that said switching means is configured so as not to select the same thermocouple at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6676987U JPS63175829U (en) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6676987U JPS63175829U (en) | 1987-05-06 | 1987-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63175829U true JPS63175829U (en) | 1988-11-15 |
Family
ID=30905070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6676987U Pending JPS63175829U (en) | 1987-05-06 | 1987-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63175829U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4677681B2 (en) * | 2001-05-07 | 2011-04-27 | 東京エレクトロン株式会社 | Thermocouple signal processing apparatus, thermocouple signal processing method, and heat treatment apparatus |
-
1987
- 1987-05-06 JP JP6676987U patent/JPS63175829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4677681B2 (en) * | 2001-05-07 | 2011-04-27 | 東京エレクトロン株式会社 | Thermocouple signal processing apparatus, thermocouple signal processing method, and heat treatment apparatus |
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