JPS63175158U - - Google Patents
Info
- Publication number
- JPS63175158U JPS63175158U JP4883987U JP4883987U JPS63175158U JP S63175158 U JPS63175158 U JP S63175158U JP 4883987 U JP4883987 U JP 4883987U JP 4883987 U JP4883987 U JP 4883987U JP S63175158 U JPS63175158 U JP S63175158U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas blowing
- plasma discharge
- discharge field
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 230000035699 permeability Effects 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4883987U JPH0543094Y2 (sk) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4883987U JPH0543094Y2 (sk) | 1987-03-31 | 1987-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63175158U true JPS63175158U (sk) | 1988-11-14 |
| JPH0543094Y2 JPH0543094Y2 (sk) | 1993-10-29 |
Family
ID=30870746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4883987U Expired - Lifetime JPH0543094Y2 (sk) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543094Y2 (sk) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005026233A (ja) * | 1996-10-02 | 2005-01-27 | Tokyo Electron Ltd | プラズマ処理装置 |
| JP2012111984A (ja) * | 2010-11-22 | 2012-06-14 | Kojima Press Industry Co Ltd | 樹脂基材の表面被膜形成装置 |
-
1987
- 1987-03-31 JP JP4883987U patent/JPH0543094Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005026233A (ja) * | 1996-10-02 | 2005-01-27 | Tokyo Electron Ltd | プラズマ処理装置 |
| JP2012111984A (ja) * | 2010-11-22 | 2012-06-14 | Kojima Press Industry Co Ltd | 樹脂基材の表面被膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543094Y2 (sk) | 1993-10-29 |
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