JPS63174982U - - Google Patents
Info
- Publication number
- JPS63174982U JPS63174982U JP1987064246U JP6424687U JPS63174982U JP S63174982 U JPS63174982 U JP S63174982U JP 1987064246 U JP1987064246 U JP 1987064246U JP 6424687 U JP6424687 U JP 6424687U JP S63174982 U JPS63174982 U JP S63174982U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- transmitted
- hole
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005553 drilling Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987064246U JPS63174982U (cs) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987064246U JPS63174982U (cs) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63174982U true JPS63174982U (cs) | 1988-11-14 |
Family
ID=30900230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987064246U Pending JPS63174982U (cs) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63174982U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116209537A (zh) * | 2020-08-28 | 2023-06-02 | 加坦公司 | 用于半导体封装故障分析的仪器和方法 |
-
1987
- 1987-04-30 JP JP1987064246U patent/JPS63174982U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116209537A (zh) * | 2020-08-28 | 2023-06-02 | 加坦公司 | 用于半导体封装故障分析的仪器和方法 |
| JP2023553235A (ja) * | 2020-08-28 | 2023-12-21 | ガタン インコーポレイテッド | 半導体パッケージ故障分析の装置及び方法 |