JPS63174439U - - Google Patents
Info
- Publication number
- JPS63174439U JPS63174439U JP5642587U JP5642587U JPS63174439U JP S63174439 U JPS63174439 U JP S63174439U JP 5642587 U JP5642587 U JP 5642587U JP 5642587 U JP5642587 U JP 5642587U JP S63174439 U JPS63174439 U JP S63174439U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- drive device
- cam
- swings
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5642587U JPS63174439U (cs) | 1987-04-13 | 1987-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5642587U JPS63174439U (cs) | 1987-04-13 | 1987-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63174439U true JPS63174439U (cs) | 1988-11-11 |
Family
ID=30885214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5642587U Pending JPS63174439U (cs) | 1987-04-13 | 1987-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63174439U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062685U (ja) * | 1992-06-12 | 1994-01-14 | 株式会社カイジョー | 半導体基板自動処理装置 |
-
1987
- 1987-04-13 JP JP5642587U patent/JPS63174439U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062685U (ja) * | 1992-06-12 | 1994-01-14 | 株式会社カイジョー | 半導体基板自動処理装置 |