JPS63174158U - - Google Patents
Info
- Publication number
- JPS63174158U JPS63174158U JP1518287U JP1518287U JPS63174158U JP S63174158 U JPS63174158 U JP S63174158U JP 1518287 U JP1518287 U JP 1518287U JP 1518287 U JP1518287 U JP 1518287U JP S63174158 U JPS63174158 U JP S63174158U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- faraday cup
- rotary table
- code plate
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000609 electron-beam lithography Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000007246 mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518287U JPH0548355Y2 (en:Method) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518287U JPH0548355Y2 (en:Method) | 1987-02-04 | 1987-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174158U true JPS63174158U (en:Method) | 1988-11-11 |
| JPH0548355Y2 JPH0548355Y2 (en:Method) | 1993-12-24 |
Family
ID=30805876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1518287U Expired - Lifetime JPH0548355Y2 (en:Method) | 1987-02-04 | 1987-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548355Y2 (en:Method) |
-
1987
- 1987-02-04 JP JP1518287U patent/JPH0548355Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548355Y2 (en:Method) | 1993-12-24 |