JPS63173245U - - Google Patents
Info
- Publication number
- JPS63173245U JPS63173245U JP1987064165U JP6416587U JPS63173245U JP S63173245 U JPS63173245 U JP S63173245U JP 1987064165 U JP1987064165 U JP 1987064165U JP 6416587 U JP6416587 U JP 6416587U JP S63173245 U JPS63173245 U JP S63173245U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- plate
- outer frame
- immersed
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987064165U JPS63173245U (de) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987064165U JPS63173245U (de) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63173245U true JPS63173245U (de) | 1988-11-10 |
Family
ID=30900074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987064165U Pending JPS63173245U (de) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63173245U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03283535A (ja) * | 1990-03-30 | 1991-12-13 | Tokyo Electron Ltd | ウエット洗浄装置 |
| JPH07169731A (ja) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | ウェーハ洗浄槽 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
| JPS57138141A (en) * | 1981-02-20 | 1982-08-26 | Hitachi Ltd | Wet treating device |
| JPS61228629A (ja) * | 1985-04-02 | 1986-10-11 | Mitsubishi Electric Corp | ウエハ等薄板体の表面処理装置 |
-
1987
- 1987-04-30 JP JP1987064165U patent/JPS63173245U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
| JPS57138141A (en) * | 1981-02-20 | 1982-08-26 | Hitachi Ltd | Wet treating device |
| JPS61228629A (ja) * | 1985-04-02 | 1986-10-11 | Mitsubishi Electric Corp | ウエハ等薄板体の表面処理装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03283535A (ja) * | 1990-03-30 | 1991-12-13 | Tokyo Electron Ltd | ウエット洗浄装置 |
| JPH07169731A (ja) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | ウェーハ洗浄槽 |