JPS63172050U - - Google Patents
Info
- Publication number
- JPS63172050U JPS63172050U JP6410387U JP6410387U JPS63172050U JP S63172050 U JPS63172050 U JP S63172050U JP 6410387 U JP6410387 U JP 6410387U JP 6410387 U JP6410387 U JP 6410387U JP S63172050 U JPS63172050 U JP S63172050U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- ion mass
- exhaust hole
- differential exhaust
- secondary ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 10
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004949 mass spectrometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6410387U JPS63172050U (sl) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6410387U JPS63172050U (sl) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172050U true JPS63172050U (sl) | 1988-11-09 |
Family
ID=30899957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6410387U Pending JPS63172050U (sl) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172050U (sl) |
-
1987
- 1987-04-30 JP JP6410387U patent/JPS63172050U/ja active Pending