JPS63170951U - - Google Patents
Info
- Publication number
- JPS63170951U JPS63170951U JP1987062677U JP6267787U JPS63170951U JP S63170951 U JPS63170951 U JP S63170951U JP 1987062677 U JP1987062677 U JP 1987062677U JP 6267787 U JP6267787 U JP 6267787U JP S63170951 U JPS63170951 U JP S63170951U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- wafer
- heat treatment
- core tube
- support boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062677U JPH0322908Y2 (enExample) | 1987-04-27 | 1987-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062677U JPH0322908Y2 (enExample) | 1987-04-27 | 1987-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170951U true JPS63170951U (enExample) | 1988-11-07 |
| JPH0322908Y2 JPH0322908Y2 (enExample) | 1991-05-20 |
Family
ID=30897176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062677U Expired JPH0322908Y2 (enExample) | 1987-04-27 | 1987-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322908Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109444U (enExample) * | 1985-12-26 | 1987-07-13 |
-
1987
- 1987-04-27 JP JP1987062677U patent/JPH0322908Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109444U (enExample) * | 1985-12-26 | 1987-07-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322908Y2 (enExample) | 1991-05-20 |