JPS63170938U - - Google Patents

Info

Publication number

JPS63170938U

JPS63170938U JP6222387U JP6222387U JPS63170938U JP S63170938 U JPS63170938 U JP S63170938U JP 6222387 U JP6222387 U JP 6222387U JP 6222387 U JP6222387 U JP 6222387U JP S63170938 U JPS63170938 U JP S63170938U

Authority

JP

Japan

Prior art keywords

vacuum

chamber

end point

processing chamber

etching

Prior art date

1987-04-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 11
• 238000005530 etching Methods 0.000 claims description 5
• 230000003287 optical effect Effects 0.000 claims 1
• 238000005192 partition Methods 0.000 claims 1
• 238000001020 plasma etching Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1

Cited By (1)