JPS63170655A - Production for electron photographic sensitive body - Google Patents
Production for electron photographic sensitive bodyInfo
- Publication number
- JPS63170655A JPS63170655A JP270987A JP270987A JPS63170655A JP S63170655 A JPS63170655 A JP S63170655A JP 270987 A JP270987 A JP 270987A JP 270987 A JP270987 A JP 270987A JP S63170655 A JPS63170655 A JP S63170655A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- deposited
- photoreceptor
- substrate
- photosensitive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims abstract description 8
- 108091008695 photoreceptors Proteins 0.000 claims description 28
- 239000011669 selenium Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052711 selenium Inorganic materials 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 12
- 238000001771 vacuum deposition Methods 0.000 abstract description 7
- 230000008021 deposition Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 16
- 229910000967 As alloy Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003353 gold alloy Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 206010064127 Solar lentigo Diseases 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/05—Organic bonding materials; Methods for coating a substrate with a photoconductive layer; Inert supplements for use in photoconductive layers
- G03G5/0525—Coating methods
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、純Ｓｅ、 ５ｅ−Ｔｏ金合金５ｅ−Ａｓ合金
、 Ｓｅ−Ｔｅ −Ａｓ合金等のセレン系感光層材料を
導電性基体上に蒸着して感光層を形成する電子写真用感
光体の製造方法に関する。Detailed Description of the Invention [Industrial Field of Application] The present invention is directed to the use of selenium-based photosensitive layer materials such as pure Se, 5e-To gold alloy, 5e-As alloy, and Se-Te-As alloy on a conductive substrate. The present invention relates to a method for manufacturing an electrophotographic photoreceptor in which a photoreceptor layer is formed by vapor deposition.
電子写真用感光体としては、Ｍの円筒状基体の上に純Ｓ
ｅ、 ５ｅ−Ｔｏ金合金５ｓ−Ａｓ合金、５ｅ−Ｔｅ−
Ａｓ合金等のＳｅ系材料を真空蒸着することによって光
導電性薄膜を形成したものが知られている。これらの電
子写真用感光体を普通紙複写機（Ｐ Ｐ Ｃ）。As a photoreceptor for electrophotography, pure S is placed on a cylindrical substrate of M.
e, 5e-To gold alloy 5s-As alloy, 5e-Te-
It is known that a photoconductive thin film is formed by vacuum-depositing a Se-based material such as an As alloy. These electrophotographic photoreceptors are used in plain paper copying machines (PPC).
レーザビームプリンタ等の電子写真装置に組込んで使用
した時の性能を表わす指標の中に、感光体が電荷を受容
する能力、すなわち帯電性能があるが、これは電子写真
の画像においては黒色部の濃淡に影響を及ぼすため、で
きるだけ一定であることが望ましい、この感光体の帯電
性能は、同種の感光層材料を使用した場合、その感光層
の膜厚と大きな正の相関を有する。すなわち、感光体の
帯電性能を一定にするためには、その感光層の膜厚を一
定にする必要がある。一般に良好な画像品質を得るため
には、感光層の膜厚のばらつきは±１０％以内が望まし
く、製品規格もその近傍の値に決められる事が多い。Among the indicators that express the performance when installed and used in an electrophotographic device such as a laser beam printer, there is the ability of the photoreceptor to accept electric charge, that is, the charging performance. The charging performance of the photoreceptor, which is desirable to be as constant as possible because it affects the density of the photosensitive layer, has a large positive correlation with the thickness of the photosensitive layer when the same type of photosensitive layer material is used. That is, in order to make the charging performance of the photoreceptor constant, it is necessary to make the thickness of the photosensitive layer constant. Generally, in order to obtain good image quality, it is desirable that the variation in the thickness of the photosensitive layer be within ±10%, and product specifications are often determined to values around this range.
しかしながら、系の材料から真空蒸着によって一定の膜
厚の感光層を形成するのはむずかしく、製造工程におい
て、多くの規格外品、すなわち膜厚が厚ずぎる、薄すぎ
る等の感光体が発生している。これらの規格外品は、従
来は不良品として処理されるため製造コストを押し上げ
る一因となっている。However, it is difficult to form a photoreceptor layer with a constant thickness using vacuum evaporation from similar materials, and many non-standard photoreceptors are produced during the manufacturing process, that is, photoreceptors with film thicknesses that are too thick or too thin. ing. Conventionally, these non-standard products are treated as defective products, which is a cause of increasing manufacturing costs.
また、感光体の性能を表わすもう一つの指標として、感
光層の部分的な欠陥、すなわち凸状のピンホール、凹状
のピンホールその他感光層表面の凹凸の有無が挙げられ
る。これらは多くの場合、電子写真の画像上において、
円形をはじめその他さまざまな形状の白抜けや黒点の原
因となるばかりでなく、特に凸状の欠陥については、電
子写真装置内部で感光体表面のトナーをクリーニングす
るためのブレードを損傷させる等の問題がある。Another indicator of the performance of the photoreceptor is the presence or absence of partial defects in the photosensitive layer, ie, convex pinholes, concave pinholes, and other irregularities on the surface of the photosensitive layer. These are often on electronic photographic images,
Not only do they cause white spots and sunspots in various shapes, including circles, but convex defects in particular can cause problems such as damaging the blade used to clean the toner on the surface of the photoreceptor inside the electrophotographic device. There is.
その為、ピンホール等の膜欠陥、特に凸状ピンホールに
ついては、その欠陥の大きさが厳しく制限されており、
製造工程における不良発生の大きな要因となっている。Therefore, the size of film defects such as pinholes, especially convex pinholes, is strictly limited.
This is a major cause of defects in the manufacturing process.
本発明の目的は、上記の問題を解決するため、真空蒸着
によって所定の膜厚が形成できない場合にも所定の膜厚
の感光層が得られ、また膜欠陥の不良も除去できる電子
写真用感光体の製造方法を提供することにある。In order to solve the above-mentioned problems, an object of the present invention is to provide a photosensitive layer for electrophotography that can obtain a photosensitive layer with a predetermined thickness even when a predetermined film thickness cannot be formed by vacuum evaporation, and can also eliminate film defects. The objective is to provide a method for manufacturing the body.
上記の目的を達成するために、本発明は、基体表面に感
光層材料を蒸着したのちその表面を研削し、次いで研削
後の表面に前記の蒸着の厚さに比して薄い厚さに再度感
光層材料を蒸着するものとする。In order to achieve the above object, the present invention involves depositing a photosensitive layer material on the surface of a substrate, then grinding the surface, and then reapplying the ground surface to a thickness thinner than the thickness of the above-mentioned vapor deposition. The photosensitive layer material shall be deposited.
最初の真空蒸着層の膜厚に応じて研削する厚さおよび再
度の真空蒸着の厚さを制御することにより、最終的に所
定の厚さの感光層を形成できる。By controlling the thickness of the grinding and the thickness of the second vacuum deposition depending on the thickness of the first vacuum deposited layer, it is possible to finally form a photosensitive layer with a predetermined thickness.
また最初の蒸着において発生した膜欠陥のうち、凸状の
ピンホールは研削によって完全に除去することができ、
また凹状のとンホールも浅いものは完全に除去可能であ
り、深いものも再度の蒸着によりかなり浅くなって、欠
陥不良が大幅に低減される。なお、単に感光層を２回に
分けて蒸着する場合は、最初の蒸着層表面に形成された
酸化膜が介在するため、感光体の特性が害されるが、本
発明の方法では研削によって酸化膜が除去されるのでそ
の虞がない。Furthermore, among the film defects that occurred during the initial deposition, convex pinholes can be completely removed by grinding.
In addition, shallow concave holes can be completely removed, and deep ones can be made considerably shallower by repeating vapor deposition, thereby significantly reducing defects. Note that if the photosensitive layer is simply vapor-deposited in two steps, the oxide film formed on the surface of the first vapor-deposited layer will be present, impairing the properties of the photoreceptor, but in the method of the present invention, the oxide film is removed by grinding. is removed, so there is no risk of this happening.
実施例１：膜厚が薄すぎる感光体の再生感光層の膜厚規
格が６０−±５４に対して、第１回目の真空蒸着で５３
−の膜厚が得られた感光体を旋盤に装着し、砥石により
約１−の厚さを研削した。研削後にトリクレンおよびト
リクレン蒸気により洗浄を行い、さらに同種の感光層材
料を約１０−の厚さに真空蒸着した結果膜厚が６Ｉｎと
なり、膜厚規格を満足した電子写真用感光体として再生
する事ができた。Example 1: The thickness standard of the regenerated photosensitive layer of a photoconductor with a too thin film thickness was 60-±54, but the thickness was 53 in the first vacuum deposition.
The photoreceptor having a film thickness of - was mounted on a lathe and ground to a thickness of about 1 - with a grindstone. After grinding, the material was cleaned with trichlene and trichlene vapor, and the same type of photosensitive layer material was vacuum-deposited to a thickness of approximately 10 mm, resulting in a film thickness of 6 In, which allowed it to be recycled as an electrophotographic photoreceptor that satisfied the film thickness standard. was completed.
実施例２：膜厚が厚すぎる感光体の再生実施例１と同様
の膜厚規格に対して真空蒸着によって形成された感光層
の膜厚が６８ｎとなった感゛光体を旋盤に装着し、約２
０ｎの厚さを研削したのち、約１０＃ｌｌの厚さの再蒸
着を行うことにより、膜厚５８ｓの感光層が得られ、膜
厚規格を満足することができた。Example 2: Regeneration of a photoreceptor with too thick a film A photoreceptor with a photoreceptor layer formed by vacuum deposition having a film thickness of 68 nm in accordance with the same film thickness standard as in Example 1 was mounted on a lathe. , about 2
After grinding to a thickness of 0n, redeposition was performed to a thickness of about 10#ll, thereby obtaining a photosensitive layer with a thickness of 58s, which satisfied the film thickness standard.
実施例３：感光層にピンホールが生じた感光体の再生
最初、第１図ｔａｌに示すようにＭの基体１の上に真空
蒸着によって感光層２を形成した時に、凹状ピンホール
３や凸状ピンホール４を生じて画像不良となった感光体
に対して、第１図伽）に点線で示すように凹状ピンホー
ル３の底部を越える部分５を研削した。そのあと感光層
２の上に再び蒸着層６を形成し、所定の厚さに復旧する
ことにより、表面欠陥のない感光体が得られた。Example 3: Reproduction of a photoreceptor with pinholes in the photoreceptor layer Initially, when the photoreceptor layer 2 was formed by vacuum deposition on the M substrate 1 as shown in FIG. For a photoreceptor which had a defective image due to the formation of pinholes 4, the portion 5 beyond the bottom of the concave pinhole 3 was ground as shown by the dotted line in FIG. Thereafter, a vapor deposited layer 6 was formed again on the photosensitive layer 2 to restore the predetermined thickness, thereby obtaining a photoreceptor free of surface defects.
本発明によれば、Ｓｅ系材料の真空蒸着によって形成し
た感光層の膜厚が薄すぎたり、厚すぎたりしたものに対
して、感光層の厚さの一部を研削により除去し、再蒸着
により所定の膜厚にすることにより、所望の帯電性能を
もつ電子写真感光体を得ることができる。なお、１回の
工程で所期の結果が得られないときには工程を繰り返す
こともできる。また、同様の工程によりピンホール等の
表面欠陥のある感光層を再生することもでき、従来膜厚
規格不適合あるいは表面欠陥によって不良とされていた
感光体を良品とすることができるので感光体製造歩留り
を向上させることができる。According to the present invention, if the thickness of the photosensitive layer formed by vacuum evaporation of Se-based material is too thin or too thick, a part of the thickness of the photosensitive layer is removed by grinding and redeposited. By setting the film thickness to a predetermined value, an electrophotographic photoreceptor having desired charging performance can be obtained. Note that if the desired result is not obtained in one step, the steps can be repeated. In addition, photoconductors with surface defects such as pinholes can be regenerated using the same process, and photoconductors that were previously judged to be defective due to non-compliance with film thickness standards or surface defects can be made into good products. Yield can be improved.
第１図ｆａｔ〜（ｅｌは本発明の一実施例における表面
欠陥感光体再生の工程を順次示す断面図である。
１：基体、２：感光層、３：凹状ピンホール、４：凸状
ピンホール、５：研削部分、６：再蒸着層。
凹救ビオ・−ツノ
第１図FIG. 1 is a sectional view sequentially showing the steps of regenerating a surface-defected photoreceptor in an embodiment of the present invention. 1: Substrate, 2: Photosensitive layer, 3: Concave pinhole, 4: Convex pin Hole, 5: Grinding part, 6: Redeposited layer. Diagram 1 of the concave relief bio-horn
Claims (1)
層を形成するに際し、基体表面に感光層材料を蒸着した
のちその表面を研削し、次いで研削後の表面に前記の蒸
着の厚さに比して薄い厚さに再度感光層材料を蒸着する
ことを特徴とする電子写真用感光体の製造方法。1) When forming a photosensitive layer by vapor depositing a selenium-based photosensitive layer material on a conductive substrate, the photosensitive layer material is vapor deposited on the surface of the substrate, and then the surface is ground, and then the thickness of the above-mentioned vapor deposition is applied to the ground surface. 1. A method for producing an electrophotographic photoreceptor, which comprises depositing a photoreceptor layer material again to a thinner thickness than the original photoreceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP270987A JPS63170655A (en) | 1987-01-09 | 1987-01-09 | Production for electron photographic sensitive body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP270987A JPS63170655A (en) | 1987-01-09 | 1987-01-09 | Production for electron photographic sensitive body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170655A true JPS63170655A (en) | 1988-07-14 |
Family
ID=11536824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP270987A Pending JPS63170655A (en) | 1987-01-09 | 1987-01-09 | Production for electron photographic sensitive body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170655A (en) |
-
1987
- 1987-01-09 JP JP270987A patent/JPS63170655A/en active Pending
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