JPS63170467U - - Google Patents
Info
- Publication number
- JPS63170467U JPS63170467U JP6502487U JP6502487U JPS63170467U JP S63170467 U JPS63170467 U JP S63170467U JP 6502487 U JP6502487 U JP 6502487U JP 6502487 U JP6502487 U JP 6502487U JP S63170467 U JPS63170467 U JP S63170467U
- Authority
- JP
- Japan
- Prior art keywords
- glass tube
- barrel
- quartz
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6502487U JPS63170467U (enExample) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6502487U JPS63170467U (enExample) | 1987-04-28 | 1987-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170467U true JPS63170467U (enExample) | 1988-11-07 |
Family
ID=30901718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6502487U Pending JPS63170467U (enExample) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170467U (enExample) |
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1987
- 1987-04-28 JP JP6502487U patent/JPS63170467U/ja active Pending