JPS63142826U - - Google Patents
Info
- Publication number
- JPS63142826U JPS63142826U JP1987034402U JP3440287U JPS63142826U JP S63142826 U JPS63142826 U JP S63142826U JP 1987034402 U JP1987034402 U JP 1987034402U JP 3440287 U JP3440287 U JP 3440287U JP S63142826 U JPS63142826 U JP S63142826U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- dedicated
- tubular
- tip
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987034402U JPS63142826U (enExample) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987034402U JPS63142826U (enExample) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142826U true JPS63142826U (enExample) | 1988-09-20 |
Family
ID=30842917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987034402U Pending JPS63142826U (enExample) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142826U (enExample) |
-
1987
- 1987-03-11 JP JP1987034402U patent/JPS63142826U/ja active Pending