JPS63142826U - - Google Patents
Info
- Publication number
- JPS63142826U JPS63142826U JP3440287U JP3440287U JPS63142826U JP S63142826 U JPS63142826 U JP S63142826U JP 3440287 U JP3440287 U JP 3440287U JP 3440287 U JP3440287 U JP 3440287U JP S63142826 U JPS63142826 U JP S63142826U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- dedicated
- tubular
- tip
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図はこの考案の一実施例による器具の断面
図、第２図は搬送動作を示す簡略断面図である。
１……専用フオーク、１ａ……吹出孔、２……
専用インナーチユーブ、２ａ……係合部、４……
半導体ウエハ、５……炉芯管。
FIG. 1 is a sectional view of an instrument according to an embodiment of this invention, and FIG. 2 is a simplified sectional view showing the conveyance operation. 1...Special fork, 1a...Blowout hole, 2...
Dedicated inner tube, 2a... engaging portion, 4...
Semiconductor wafer, 5...furnace core tube.
Claims (1)
多数の吹出孔が設けられた管状の専用フオークと
、 炉芯管の内径より小さい外径を有し、内面側上
部に上記専用フオークの先端側上部の外形にあわ
せた形の係合部を設けた管状の専用インナーチユ
ーブとを備えた半導体ウエハの搬送器具。[Scope of Claim for Utility Model Registration] A special tubular fork with a closed tip and a large number of blowing holes along the length at the bottom of the tip side, and a fork with an outer diameter smaller than the inner diameter of the furnace core tube, and A semiconductor wafer transport device comprising a tubular dedicated inner tube provided at the upper part with an engaging portion having a shape matching the outer shape of the top end side of the dedicated fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440287U JPS63142826U (en) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440287U JPS63142826U (en) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142826U true JPS63142826U (en) | 1988-09-20 |
Family
ID=30842917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3440287U Pending JPS63142826U (en) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142826U (en) |
-
1987
- 1987-03-11 JP JP3440287U patent/JPS63142826U/ja active Pending
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