JPS63168783U - - Google Patents

Info

Publication number
JPS63168783U
JPS63168783U JP6125287U JP6125287U JPS63168783U JP S63168783 U JPS63168783 U JP S63168783U JP 6125287 U JP6125287 U JP 6125287U JP 6125287 U JP6125287 U JP 6125287U JP S63168783 U JPS63168783 U JP S63168783U
Authority
JP
Japan
Prior art keywords
chamber
evaporation
evaporation chamber
cooled
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6125287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510206Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6125287U priority Critical patent/JPH0510206Y2/ja
Publication of JPS63168783U publication Critical patent/JPS63168783U/ja
Application granted granted Critical
Publication of JPH0510206Y2 publication Critical patent/JPH0510206Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
JP6125287U 1987-04-22 1987-04-22 Expired - Lifetime JPH0510206Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6125287U JPH0510206Y2 (enExample) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6125287U JPH0510206Y2 (enExample) 1987-04-22 1987-04-22

Publications (2)

Publication Number Publication Date
JPS63168783U true JPS63168783U (enExample) 1988-11-02
JPH0510206Y2 JPH0510206Y2 (enExample) 1993-03-12

Family

ID=30894415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6125287U Expired - Lifetime JPH0510206Y2 (enExample) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPH0510206Y2 (enExample)

Also Published As

Publication number Publication date
JPH0510206Y2 (enExample) 1993-03-12

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