JPS63168783U - - Google Patents

Info

Publication number
JPS63168783U
JPS63168783U JP6125287U JP6125287U JPS63168783U JP S63168783 U JPS63168783 U JP S63168783U JP 6125287 U JP6125287 U JP 6125287U JP 6125287 U JP6125287 U JP 6125287U JP S63168783 U JPS63168783 U JP S63168783U
Authority
JP
Japan
Prior art keywords
chamber
evaporation
evaporation chamber
cooled
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6125287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6125287U priority Critical patent/JPH0510206Y2/ja
Publication of JPS63168783U publication Critical patent/JPS63168783U/ja
Application granted granted Critical
Publication of JPH0510206Y2 publication Critical patent/JPH0510206Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
JP6125287U 1987-04-22 1987-04-22 Expired - Lifetime JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6125287U JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6125287U JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-22 1987-04-22

Publications (2)

Publication Number Publication Date
JPS63168783U true JPS63168783U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-11-02
JPH0510206Y2 JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-12

Family

ID=30894415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6125287U Expired - Lifetime JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0510206Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-12

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