JPS63168505U - - Google Patents

Info

Publication number
JPS63168505U
JPS63168505U JP5842687U JP5842687U JPS63168505U JP S63168505 U JPS63168505 U JP S63168505U JP 5842687 U JP5842687 U JP 5842687U JP 5842687 U JP5842687 U JP 5842687U JP S63168505 U JPS63168505 U JP S63168505U
Authority
JP
Japan
Prior art keywords
flow rate
current
electromagnetic solenoid
measuring section
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5842687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449690Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5842687U priority Critical patent/JPH0449690Y2/ja
Publication of JPS63168505U publication Critical patent/JPS63168505U/ja
Application granted granted Critical
Publication of JPH0449690Y2 publication Critical patent/JPH0449690Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
  • Magnetically Actuated Valves (AREA)
JP5842687U 1987-04-17 1987-04-17 Expired JPH0449690Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5842687U JPH0449690Y2 (enrdf_load_html_response) 1987-04-17 1987-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5842687U JPH0449690Y2 (enrdf_load_html_response) 1987-04-17 1987-04-17

Publications (2)

Publication Number Publication Date
JPS63168505U true JPS63168505U (enrdf_load_html_response) 1988-11-02
JPH0449690Y2 JPH0449690Y2 (enrdf_load_html_response) 1992-11-24

Family

ID=30888988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5842687U Expired JPH0449690Y2 (enrdf_load_html_response) 1987-04-17 1987-04-17

Country Status (1)

Country Link
JP (1) JPH0449690Y2 (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000262948A (ja) * 1999-03-23 2000-09-26 Konica Corp スライドビード塗布方法及びスライドビード塗布装置
JP2005207523A (ja) * 2004-01-23 2005-08-04 Yamatake Corp 流量制御装置
JP2013088946A (ja) * 2011-10-14 2013-05-13 Horiba Stec Co Ltd 流量制御装置、流量制御装置に用いられる診断装置及び診断用プログラム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000262948A (ja) * 1999-03-23 2000-09-26 Konica Corp スライドビード塗布方法及びスライドビード塗布装置
JP2005207523A (ja) * 2004-01-23 2005-08-04 Yamatake Corp 流量制御装置
JP2013088946A (ja) * 2011-10-14 2013-05-13 Horiba Stec Co Ltd 流量制御装置、流量制御装置に用いられる診断装置及び診断用プログラム

Also Published As

Publication number Publication date
JPH0449690Y2 (enrdf_load_html_response) 1992-11-24

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