JPS63168505U - - Google Patents
Info
- Publication number
- JPS63168505U JPS63168505U JP5842687U JP5842687U JPS63168505U JP S63168505 U JPS63168505 U JP S63168505U JP 5842687 U JP5842687 U JP 5842687U JP 5842687 U JP5842687 U JP 5842687U JP S63168505 U JPS63168505 U JP S63168505U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- current
- electromagnetic solenoid
- measuring section
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Magnetically Actuated Valves (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5842687U JPH0449690Y2 (de) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5842687U JPH0449690Y2 (de) | 1987-04-17 | 1987-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63168505U true JPS63168505U (de) | 1988-11-02 |
| JPH0449690Y2 JPH0449690Y2 (de) | 1992-11-24 |
Family
ID=30888988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5842687U Expired JPH0449690Y2 (de) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449690Y2 (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000262948A (ja) * | 1999-03-23 | 2000-09-26 | Konica Corp | スライドビード塗布方法及びスライドビード塗布装置 |
| JP2005207523A (ja) * | 2004-01-23 | 2005-08-04 | Yamatake Corp | 流量制御装置 |
| JP2013088946A (ja) * | 2011-10-14 | 2013-05-13 | Horiba Stec Co Ltd | 流量制御装置、流量制御装置に用いられる診断装置及び診断用プログラム |
-
1987
- 1987-04-17 JP JP5842687U patent/JPH0449690Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000262948A (ja) * | 1999-03-23 | 2000-09-26 | Konica Corp | スライドビード塗布方法及びスライドビード塗布装置 |
| JP2005207523A (ja) * | 2004-01-23 | 2005-08-04 | Yamatake Corp | 流量制御装置 |
| JP2013088946A (ja) * | 2011-10-14 | 2013-05-13 | Horiba Stec Co Ltd | 流量制御装置、流量制御装置に用いられる診断装置及び診断用プログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449690Y2 (de) | 1992-11-24 |