JPS63167739U - - Google Patents

Info

Publication number
JPS63167739U
JPS63167739U JP1987060738U JP6073887U JPS63167739U JP S63167739 U JPS63167739 U JP S63167739U JP 1987060738 U JP1987060738 U JP 1987060738U JP 6073887 U JP6073887 U JP 6073887U JP S63167739 U JPS63167739 U JP S63167739U
Authority
JP
Japan
Prior art keywords
box
blowing mechanism
drawer
wall surface
semiconductor devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987060738U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987060738U priority Critical patent/JPS63167739U/ja
Publication of JPS63167739U publication Critical patent/JPS63167739U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1987060738U 1987-04-23 1987-04-23 Pending JPS63167739U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060738U JPS63167739U (enExample) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060738U JPS63167739U (enExample) 1987-04-23 1987-04-23

Publications (1)

Publication Number Publication Date
JPS63167739U true JPS63167739U (enExample) 1988-11-01

Family

ID=30893421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060738U Pending JPS63167739U (enExample) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPS63167739U (enExample)

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