JPS63167739U - - Google Patents
Info
- Publication number
- JPS63167739U JPS63167739U JP6073887U JP6073887U JPS63167739U JP S63167739 U JPS63167739 U JP S63167739U JP 6073887 U JP6073887 U JP 6073887U JP 6073887 U JP6073887 U JP 6073887U JP S63167739 U JPS63167739 U JP S63167739U
- Authority
- JP
- Japan
- Prior art keywords
- box
- blowing mechanism
- drawer
- wall surface
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案に係る加熱オーブンの斜視図、
第２図はその要部を示す斜視図、第３図及び第４
図は送風機構と加熱源を示す断面図ならびに斜視
図、第５図は従来の加熱オーブンの斜視図である
。
FIG. 1 is a perspective view of a heating oven according to the present invention;
Figure 2 is a perspective view showing the main parts, Figures 3 and 4.
The figures are a cross-sectional view and a perspective view showing an air blowing mechanism and a heating source, and FIG. 5 is a perspective view of a conventional heating oven.
Claims (1)
を構成する面のうち水平方向に交叉する面を区分
して出入可能に取着る引出しと、前記箱体内に位
置するこの引出し部分に設ける篭状部と、前記箱
体壁面に近接して配置する送風機構と、この送風
機構に対向して設ける自動調節可能の加熱源とを
具備することを特徴とする半導体装置用加熱オー
ブン。 A box with a heat-insulating structure and a rectangular parallelepiped cross section, a drawer that can be installed in and out by dividing horizontally intersecting surfaces of the surfaces constituting the box, and a basket provided in the drawer portion located inside the box. 1. A heating oven for semiconductor devices, comprising: a shaped portion; a blowing mechanism disposed close to the wall surface of the box; and an automatically adjustable heating source provided opposite the blowing mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073887U JPS63167739U (en) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073887U JPS63167739U (en) | 1987-04-23 | 1987-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167739U true JPS63167739U (en) | 1988-11-01 |
Family
ID=30893421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6073887U Pending JPS63167739U (en) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167739U (en) |
-
1987
- 1987-04-23 JP JP6073887U patent/JPS63167739U/ja active Pending