JPS63167727U - - Google Patents
Info
- Publication number
- JPS63167727U JPS63167727U JP6115287U JP6115287U JPS63167727U JP S63167727 U JPS63167727 U JP S63167727U JP 6115287 U JP6115287 U JP 6115287U JP 6115287 U JP6115287 U JP 6115287U JP S63167727 U JPS63167727 U JP S63167727U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- spin coater
- coater device
- resist
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Optical Recording Or Reproduction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6115287U JPS63167727U (he) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6115287U JPS63167727U (he) | 1987-04-22 | 1987-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167727U true JPS63167727U (he) | 1988-11-01 |
Family
ID=30894225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6115287U Pending JPS63167727U (he) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167727U (he) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03266417A (ja) * | 1990-03-15 | 1991-11-27 | Tokyo Electron Ltd | 半導体製造装置および液処理方法 |
-
1987
- 1987-04-22 JP JP6115287U patent/JPS63167727U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03266417A (ja) * | 1990-03-15 | 1991-11-27 | Tokyo Electron Ltd | 半導体製造装置および液処理方法 |