JPS63167725U - - Google Patents
Info
- Publication number
- JPS63167725U JPS63167725U JP6186587U JP6186587U JPS63167725U JP S63167725 U JPS63167725 U JP S63167725U JP 6186587 U JP6186587 U JP 6186587U JP 6186587 U JP6186587 U JP 6186587U JP S63167725 U JPS63167725 U JP S63167725U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vapor phase
- growth
- phase epitaxial
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims 3
- 239000012808 vapor phase Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6186587U JPS63167725U (id) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6186587U JPS63167725U (id) | 1987-04-23 | 1987-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167725U true JPS63167725U (id) | 1988-11-01 |
Family
ID=30895596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6186587U Pending JPS63167725U (id) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167725U (id) |
-
1987
- 1987-04-23 JP JP6186587U patent/JPS63167725U/ja active Pending