JPS63167418U - - Google Patents
Info
- Publication number
- JPS63167418U JPS63167418U JP6074187U JP6074187U JPS63167418U JP S63167418 U JPS63167418 U JP S63167418U JP 6074187 U JP6074187 U JP 6074187U JP 6074187 U JP6074187 U JP 6074187U JP S63167418 U JPS63167418 U JP S63167418U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction plate
- silicon wafers
- pipes
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060741U JPH0530030Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060741U JPH0530030Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63167418U true JPS63167418U (enExample) | 1988-11-01 |
| JPH0530030Y2 JPH0530030Y2 (enExample) | 1993-07-30 |
Family
ID=30893428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987060741U Expired - Lifetime JPH0530030Y2 (enExample) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530030Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4957498A (enExample) * | 1972-10-04 | 1974-06-04 | ||
| JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
-
1987
- 1987-04-23 JP JP1987060741U patent/JPH0530030Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4957498A (enExample) * | 1972-10-04 | 1974-06-04 | ||
| JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530030Y2 (enExample) | 1993-07-30 |