JPS63167234U - - Google Patents

Info

Publication number
JPS63167234U
JPS63167234U JP6054287U JP6054287U JPS63167234U JP S63167234 U JPS63167234 U JP S63167234U JP 6054287 U JP6054287 U JP 6054287U JP 6054287 U JP6054287 U JP 6054287U JP S63167234 U JPS63167234 U JP S63167234U
Authority
JP
Japan
Prior art keywords
gas
tray
pressure vessel
spacer
fill
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6054287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447644Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987060542U priority Critical patent/JPH0447644Y2/ja
Publication of JPS63167234U publication Critical patent/JPS63167234U/ja
Application granted granted Critical
Publication of JPH0447644Y2 publication Critical patent/JPH0447644Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Examining Or Testing Airtightness (AREA)
JP1987060542U 1987-04-21 1987-04-21 Expired JPH0447644Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060542U JPH0447644Y2 (cg-RX-API-DMAC7.html) 1987-04-21 1987-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060542U JPH0447644Y2 (cg-RX-API-DMAC7.html) 1987-04-21 1987-04-21

Publications (2)

Publication Number Publication Date
JPS63167234U true JPS63167234U (cg-RX-API-DMAC7.html) 1988-10-31
JPH0447644Y2 JPH0447644Y2 (cg-RX-API-DMAC7.html) 1992-11-10

Family

ID=30893043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060542U Expired JPH0447644Y2 (cg-RX-API-DMAC7.html) 1987-04-21 1987-04-21

Country Status (1)

Country Link
JP (1) JPH0447644Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019718A (ja) * 1996-07-04 1998-01-23 Ulvac Japan Ltd 漏洩試験用真空容器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502988A (cg-RX-API-DMAC7.html) * 1973-05-08 1975-01-13
JPS58108756A (ja) * 1981-12-22 1983-06-28 Toshiba Corp 気密封止パッケ−ジ
JPS60158332A (ja) * 1984-01-30 1985-08-19 Mitsubishi Electric Corp 密封タンクの漏れ試験方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502988A (cg-RX-API-DMAC7.html) * 1973-05-08 1975-01-13
JPS58108756A (ja) * 1981-12-22 1983-06-28 Toshiba Corp 気密封止パッケ−ジ
JPS60158332A (ja) * 1984-01-30 1985-08-19 Mitsubishi Electric Corp 密封タンクの漏れ試験方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019718A (ja) * 1996-07-04 1998-01-23 Ulvac Japan Ltd 漏洩試験用真空容器

Also Published As

Publication number Publication date
JPH0447644Y2 (cg-RX-API-DMAC7.html) 1992-11-10

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