JPS63167234U - - Google Patents
Info
- Publication number
- JPS63167234U JPS63167234U JP6054287U JP6054287U JPS63167234U JP S63167234 U JPS63167234 U JP S63167234U JP 6054287 U JP6054287 U JP 6054287U JP 6054287 U JP6054287 U JP 6054287U JP S63167234 U JPS63167234 U JP S63167234U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tray
- pressure vessel
- spacer
- fill
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060542U JPH0447644Y2 (OSRAM) | 1987-04-21 | 1987-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060542U JPH0447644Y2 (OSRAM) | 1987-04-21 | 1987-04-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63167234U true JPS63167234U (OSRAM) | 1988-10-31 |
| JPH0447644Y2 JPH0447644Y2 (OSRAM) | 1992-11-10 |
Family
ID=30893043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987060542U Expired JPH0447644Y2 (OSRAM) | 1987-04-21 | 1987-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0447644Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1019718A (ja) * | 1996-07-04 | 1998-01-23 | Ulvac Japan Ltd | 漏洩試験用真空容器 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS502988A (OSRAM) * | 1973-05-08 | 1975-01-13 | ||
| JPS58108756A (ja) * | 1981-12-22 | 1983-06-28 | Toshiba Corp | 気密封止パッケ−ジ |
| JPS60158332A (ja) * | 1984-01-30 | 1985-08-19 | Mitsubishi Electric Corp | 密封タンクの漏れ試験方法 |
-
1987
- 1987-04-21 JP JP1987060542U patent/JPH0447644Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS502988A (OSRAM) * | 1973-05-08 | 1975-01-13 | ||
| JPS58108756A (ja) * | 1981-12-22 | 1983-06-28 | Toshiba Corp | 気密封止パッケ−ジ |
| JPS60158332A (ja) * | 1984-01-30 | 1985-08-19 | Mitsubishi Electric Corp | 密封タンクの漏れ試験方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1019718A (ja) * | 1996-07-04 | 1998-01-23 | Ulvac Japan Ltd | 漏洩試験用真空容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447644Y2 (OSRAM) | 1992-11-10 |
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