JPS63167167U - - Google Patents
Info
- Publication number
- JPS63167167U JPS63167167U JP5835587U JP5835587U JPS63167167U JP S63167167 U JPS63167167 U JP S63167167U JP 5835587 U JP5835587 U JP 5835587U JP 5835587 U JP5835587 U JP 5835587U JP S63167167 U JPS63167167 U JP S63167167U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- evaporation source
- vapor deposition
- utility
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835587U JPS63167167U (enExample) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835587U JPS63167167U (enExample) | 1987-04-17 | 1987-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167167U true JPS63167167U (enExample) | 1988-10-31 |
Family
ID=30888853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5835587U Pending JPS63167167U (enExample) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167167U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (ja) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | 電子ビーム溶解炉の覗き窓部およびその運転方法 |
-
1987
- 1987-04-17 JP JP5835587U patent/JPS63167167U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (ja) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | 電子ビーム溶解炉の覗き窓部およびその運転方法 |