JPS63166954A - Method for forming ceramic member - Google Patents

Method for forming ceramic member

Info

Publication number
JPS63166954A
JPS63166954A JP30905386A JP30905386A JPS63166954A JP S63166954 A JPS63166954 A JP S63166954A JP 30905386 A JP30905386 A JP 30905386A JP 30905386 A JP30905386 A JP 30905386A JP S63166954 A JPS63166954 A JP S63166954A
Authority
JP
Japan
Prior art keywords
base material
film
ceramic
thermal spraying
ceramic member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30905386A
Other languages
Japanese (ja)
Inventor
Yoshikazu Takahashi
高橋 由和
Takao Suzuki
隆夫 鈴木
Masayuki Ito
伊藤 昌行
Hiromitsu Takeda
博光 竹田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP30905386A priority Critical patent/JPS63166954A/en
Publication of JPS63166954A publication Critical patent/JPS63166954A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18After-treatment
    • C23C4/185Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

PURPOSE:To easily produce a formed ceramic member by forming a film of a fire resistant metal on the surface of a base material made of a metal, thermally spraying ceramics on the film, oxidizing the film under heating and pulling the base material out of the resulting thermally sprayed ceramic body. CONSTITUTION:A film 14 of a fire resistant metal such as W, Mo, Ta or Hf is formed on the surface of a cylindrical base material 11 made of mild steel or the like by thermal spraying with a thermal spraying device 12. During the formation of the film 14, the inside of the base material 11 is cooled with a cooler 13 so as to prevent the film 14 from losing the adhesion and strength by oxidation at high temp. A ceramic layer 15 of a prescribed thickness is then formed on the film 14 by thermal spraying and heated to >=500 deg.C with a heater 16 in an atmosphere contg. oxygen, e.g., in the air to violently oxidize the film 14. By this oxidation, the bonding strength between the base material 11 and the ceramic layer 15 is reduced. The base material 11 is separated from the ceramic layer 15 and the resulting formed ceramic body is subjected to final finish working to obtain a formed ceramic member.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) この発明は、セラミックス部材の成形技術に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a technology for molding ceramic members.

(従来の技術) セラミックスはほとんどの場合、ぜい性な材料であり、
鍛造など塑性変形を利用した加工は不可能である。現在
構造用のセラミックス部材は、ほとんど焼結法を用いて
作られている。これは、さまざまな方法により製品形状
に成形した後焼結を行ない、仕上げ加工を施して製品と
する。このようなプロセスにはいくつかの問題点がある
。ひとつは高融点のセラミックスを焼結するため、高温
を必要とし、そのためコストが高くなることである。ま
た複雑な形状の部材を作ろうとする場合、焼結後に大幅
な切削加工を行なわねばならず、これも高コストとなる
。これはセラミックスは一般に硬度が高くもろいため、
ダイヤモンド研摩などの方法に依らねば加工ができない
からである。
(Conventional technology) Ceramics are mostly brittle materials;
Processing using plastic deformation such as forging is impossible. Currently, most structural ceramic members are made using the sintering method. It is formed into a product shape using various methods, then sintered and finished. There are several problems with such a process. One is that sintering ceramics with a high melting point requires high temperatures, which increases costs. Furthermore, if a member with a complicated shape is to be manufactured, extensive cutting must be performed after sintering, which also results in high costs. This is because ceramics are generally hard and brittle.
This is because processing cannot be performed without using methods such as diamond polishing.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) すなわち本発明のセラミックス部材成形方法gt、両射
方法を用いたセラミック部材の成形方法に8いて、耐火
金属よりなる金属層で表面が被覆さt′t。
(Means for Solving the Problems) That is, in the ceramic member molding method gt of the present invention and the ceramic member molding method using a bi-injection method, the surface is coated with a metal layer made of a refractory metal.

た所定の形状の溶射の基材上にセラミックス材料の溶射
を行なう第1の工程と、前記第1の工程の後大気中で加
熱して前記金属層を酸化する第2の工程と、前記第2の
工程の後、前言己基材よりセラミックスの成形体を分離
する第3の工程とを具えたことを特徴とする。
a first step of thermally spraying a ceramic material onto a thermal spraying base material having a predetermined shape; a second step of oxidizing the metal layer by heating in the atmosphere after the first step; After step 2, the present invention is characterized by comprising a third step of separating the ceramic molded body from the base material.

本発明の工程の具体的な一例として、円筒体を成形する
場合を以下に第1図を用いて説明する。
As a specific example of the process of the present invention, the case of molding a cylindrical body will be described below with reference to FIG.

(1)形成しようとする形状に対応した表面形状を成す
溶射の基材11を用意する。この基材は、後のプロセス
を考えると金属製であってたとえば軟鋼製等であること
が好ましい。(第1図(a))(2)次に該基材11の
表面上に、W、Mo、Ta。
(1) A thermal spray base material 11 having a surface shape corresponding to the shape to be formed is prepared. Considering the subsequent process, this base material is preferably made of metal, such as mild steel. (FIG. 1(a)) (2) Next, on the surface of the base material 11, W, Mo, and Ta are applied.

Hf等の耐火金属よりなる金属皮膜14を形成する。こ
こでは溶射装置12を用いているが、可能であれば他の
方法でももちろんかまわない。この時溶射を施工する際
、該金属皮膜が酸化して、密着性や強度を失わぬよう冷
却装置13を用いることは有効である。(第1図(b)
) (3)金属層の形成が終了した後、セラミックスの溶射
を、所期の淳さのセラミックス層15が形成するまで行
なう。
A metal film 14 made of a refractory metal such as Hf is formed. Although the thermal spraying device 12 is used here, other methods may of course be used if possible. When performing thermal spraying at this time, it is effective to use the cooling device 13 to prevent the metal coating from oxidizing and losing its adhesion and strength. (Figure 1(b)
(3) After the formation of the metal layer is completed, thermal spraying of ceramics is carried out until the ceramic layer 15 of the desired thickness is formed.

(4)このセラミックス層15を形成した後、大気中な
どの酸素を含む雰囲気中において、加熱装置16により
500℃以上の温度に加熱する。この工程により金属皮
膜14は著しく酸化する。(第1図(C)) (5)付着力が小さくなった基材11とセラミックス層
15を分離する。(第1図(d))(6)所期のセラミ
ックスの成形体を得る。
(4) After forming this ceramic layer 15, it is heated to a temperature of 500° C. or higher using a heating device 16 in an atmosphere containing oxygen such as the atmosphere. This process significantly oxidizes the metal film 14. (FIG. 1(C)) (5) Separate the base material 11 and the ceramic layer 15 whose adhesion has become weaker. (Figure 1(d)) (6) Obtain the desired ceramic molded body.

以上の方法により、焼結などの工程を経ずに成形体が得
られる。必要に応じて成形の後、仕上げ加工を行なう。
By the above method, a molded body can be obtained without going through steps such as sintering. After molding, finish processing is performed as necessary.

(第1図(e)) (作用) 本願発明は、基材の表面上にW等の耐火金属よりなる皮
膜を形成することで、密着性良くセラミックスの部材を
形成することができ、さらに容易にその基材からセラミ
ックスの部材を分離することができる。これはW等が例
えば500℃程度で大気中で加熱されると、急激に酸化
して粉末状となり、密着性や強度を失う性質を用いたも
のである0(実施例) 第1の実施例 内径40m、肉厚2m+、長iik300mのZrO,
−8atf6Yt Os 裏門筒体を以下のようにして
成形した。
(Fig. 1(e)) (Function) The present invention can form a ceramic member with good adhesion by forming a film made of a refractory metal such as W on the surface of a base material, and it is even easier to form a ceramic member. The ceramic member can be separated from the base material. This is based on the property that when W or the like is heated in the atmosphere at about 500°C, it rapidly oxidizes and becomes powdery, losing adhesion and strength.0 (Example) First Example ZrO with inner diameter 40m, wall thickness 2m+, length 300m,
-8atf6Yt Os The back gate cylinder body was molded as follows.

まず、外径39.51111−、肉厚3 Ill 、厚
さ350龍の円筒のstrsao4gの管を用意した。
First, a cylindrical tube with an outer diameter of 39.51111 mm, a wall thickness of 3 Ill, and a thickness of 350 mm and weighing 4 g was prepared.

そして溶射に先立ってアルミナ粉末によるサンドブラス
ト処理を行なった。次いでこの円筒を支持具に水平に固
定して回転させながら、かつ水平方向に移動してWの溶
射を行なった。またこの時、同時に高圧空気により溶射
部の冷却を行なった。そして、約200μmの厚さのW
皮膜を形成した。次いでZrO2−s%Y、0.の溶射
を行ない、2龍の溶射層を形成した。
Prior to thermal spraying, sandblasting with alumina powder was performed. Next, this cylinder was horizontally fixed to a support, rotated, and moved horizontally to perform thermal spraying of W. At this time, the sprayed area was simultaneously cooled with high-pressure air. Then, about 200 μm thick W
A film was formed. Then ZrO2-s%Y, 0. Thermal spraying was carried out to form two thermal sprayed layers.

これらの溶射条件を以下の第1表に示す。These thermal spray conditions are shown in Table 1 below.

第1表 さらに、このZrO,−8%YtO,の溶射層を形成し
た後、600℃の電気炉中に7時間保持した。その結果
Wが酸化して基材からセラミックス層を容易に分離、す
ることができた。こうして形成したZ ro。
Table 1 Furthermore, after forming this sprayed layer of ZrO and -8% YtO, it was held in an electric furnace at 600°C for 7 hours. As a result, W was oxidized and the ceramic layer could be easily separated from the base material. Thus formed Z ro.

8 To Yt Os円筒体にはクラックなどは観察さ
れなかった。
No cracks were observed in the 8 To Yt Os cylinder.

第2の実施例 60#X60mの中ぐりるつぼ形状の軟鋼の基材を用意
した。第1の実施例と同様にして、Wおよびアルミナ層
をそれぞれ200μm、2關の厚さで溶射により形成し
た。溶射後200℃の電気炉中に1時間保持した。基板
とアルミナ溶射層は、はとんど手を加えずに容易に分離
することができた。
Second Example A mild steel base material in the shape of a bored crucible of 60# x 60m was prepared. In the same manner as in the first example, W and alumina layers were each formed by thermal spraying to a thickness of 200 μm and 2 inches. After thermal spraying, it was kept in an electric furnace at 200°C for 1 hour. The substrate and the alumina sprayed layer could be easily separated with little modification.

〔発明の効果〕〔Effect of the invention〕

本発明のセラミックス部材形成方法によれば、形成した
セラミックス部材を基材から容易に分離することが可能
となり、その工業的価値は犬である。
According to the ceramic member forming method of the present invention, it becomes possible to easily separate the formed ceramic member from the base material, and its industrial value is enormous.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) 、 (b) 、 (C) 、 (d) 
、 (e) 、は本発明の製造方法の工程の一例を示し
た模擬図である。 11・・・基材、12・・・溶射装置、13・・・冷却
装置、14・・・金属皮膜、15・・・セラミックス層
、16・・・加熱装置。
Figure 1 (a), (b), (C), (d)
, (e) are schematic diagrams showing an example of the steps of the manufacturing method of the present invention. DESCRIPTION OF SYMBOLS 11... Base material, 12... Thermal spraying device, 13... Cooling device, 14... Metal film, 15... Ceramic layer, 16... Heating device.

Claims (3)

【特許請求の範囲】[Claims] (1)溶射方法を用いたセラミック部材の成形方法にお
いて、耐火金属よりなる金属層で表面が被覆された所定
の形状の溶射の基材上にセラミックス材料の溶射を行な
う第1の工程と、前記第1の工程の後大気中で加熱して
前記金属層を酸化する第2の工程と、前記第2の工程の
後、前記基材よりセラミックスの成形体を分離する第3
の工程とを具えたことを特徴とするセラミックス部材成
形方法。
(1) In a method of forming a ceramic member using a thermal spraying method, a first step of thermally spraying a ceramic material onto a thermally sprayed base material of a predetermined shape whose surface is coated with a metal layer made of a refractory metal; a second step of heating in the atmosphere to oxidize the metal layer after the first step; and a third step of separating the ceramic molded body from the base material after the second step.
A ceramic member forming method characterized by comprising the steps of:
(2)耐火金属が、W、Mo、Ta、Hfのうちから選
ばれた少なくとも1種よりなることを特徴とする特許請
求の範囲第1項記載のセラミックス部材成形方法。
(2) The method for forming a ceramic member according to claim 1, wherein the refractory metal is made of at least one selected from W, Mo, Ta, and Hf.
(3)耐火金属としてWを用いることを特徴とする特許
請求の範囲第2項に記載のセラミックス部材成形方法。
(3) The method for forming a ceramic member according to claim 2, characterized in that W is used as the refractory metal.
JP30905386A 1986-12-27 1986-12-27 Method for forming ceramic member Pending JPS63166954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30905386A JPS63166954A (en) 1986-12-27 1986-12-27 Method for forming ceramic member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30905386A JPS63166954A (en) 1986-12-27 1986-12-27 Method for forming ceramic member

Publications (1)

Publication Number Publication Date
JPS63166954A true JPS63166954A (en) 1988-07-11

Family

ID=17988305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30905386A Pending JPS63166954A (en) 1986-12-27 1986-12-27 Method for forming ceramic member

Country Status (1)

Country Link
JP (1) JPS63166954A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156060A (en) * 1988-12-07 1990-06-15 Babcock Hitachi Kk Surface treatment of metallic material
FR2663872A1 (en) * 1990-06-29 1992-01-03 Gen Electric MANUFACTURE OF TUBES USING A REUSABLE CHUCK.
JP2000516561A (en) * 1996-11-01 2000-12-12 テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム Flip cap closure integrally molded
JP2006151491A (en) * 2004-11-30 2006-06-15 Yoshino Kogyosho Co Ltd Cap with lid

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156060A (en) * 1988-12-07 1990-06-15 Babcock Hitachi Kk Surface treatment of metallic material
FR2663872A1 (en) * 1990-06-29 1992-01-03 Gen Electric MANUFACTURE OF TUBES USING A REUSABLE CHUCK.
JP2000516561A (en) * 1996-11-01 2000-12-12 テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム Flip cap closure integrally molded
JP2006151491A (en) * 2004-11-30 2006-06-15 Yoshino Kogyosho Co Ltd Cap with lid

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