JPS63166211A - Semiconductor manufacturing system - Google Patents

Abstract

PURPOSE:To make it unnecessary for an operator to come and go between semiconductor devices, and reduce generation of dust in a workshop, by operating and controlling a plurality of semiconductor aligners, applying a remote control unit distantly located. CONSTITUTION:A plurality of aligners 110, 120 and 130 process substrates under the control of a controller 115. Each aligner has a memory circuit 314, and is controlled by the command of a remote control operating panel 111. It has a selection switch 614 selecting any one among a parameter display unit 315 for setting operation conditions and the aligners, and operates an equipment- changeover switch 510 to transmit information to the controller 115 and the memory circuit 314 of the aligners. Thereby, each of the aligners 110, 120 and 130 can be subjected to a centralized control on the remote control operating panel.

Description

[Detailed Description of the Invention] [Field to which the invention pertains] The present invention relates to a semiconductor manufacturing system that enables the operation of a semiconductor manufacturing apparatus (substrate processing section) for processing a substrate such as a semiconductor quencher even at a remote location. In particular, the present invention relates to a semiconductor manufacturing system with remote central operation control that allows one operator to operate a plurality of semiconductor manufacturing devices at one location.

[Prior Art] Semiconductor manufacturing equipment, such as semiconductor exposure equipment that optically prints patterns on semiconductor integrated circuits, etc., has large external dimensions, and a plurality of them are arranged at intervals of several meters in a manufacturing area within a factory.

[Problems to be Solved by the Invention] Conventionally, when operating these devices, the operator went to the device to operate and directly operated the operation panel of the device. It required a great deal of energy and time to travel back and forth for operation.

Furthermore, since the patterns of semiconductor integrated circuits are minute, dust is the least desirable, and manufacturing plants require a high degree of cleanliness. but,
The operator of the device, ie the human being, is, in one view, a source of waste. Therefore, it is necessary that there are as few people as possible in the manufacturing plant.

The present invention has been made in view of the above-mentioned conventional problems, and eliminates the need for operators to come and go between semiconductor devices, and eliminates waste at the manufacturing site by operating the equipment in a place isolated from the manufacturing site. An object of the present invention is to provide a semiconductor manufacturing system that also makes it possible to reduce the occurrence of.

[Means and effects for solving the problems 1] Next, details of the present invention will be explained with reference to the drawings.

FIG. 1 shows a structure 11i between semiconductor devices according to an embodiment of the present invention.
! The overall configuration of the I4m system is shown. This system allows a plurality of semiconductor exposure apparatuses (three in this figure) to be operated and controlled by a remote control unit installed at a remote location.

In the figure, reference numerals 110, 120, and 130 indicate three exposure devices, and 210, 220, and 230 indicate TV cameras that monitor the movements of the respective exposure devices toward the mask and the pattern.

310 , 320 , 330 are the respective exposure devices 110 , 1
20 and 130, and includes a circuit for electrically coupling with the remote control unit 610. 410 is each exposure device 110 , 120 ,
130 is a TV screen automatic switching unit that automatically switches video signals of the TV cameras 210 , 220 , 230 in time or screen space; 510 is an exposure device 110;
, 120.

This is a device switching unit that allows selecting any one of the 130 devices and remotely controlling it. Reference numeral 610 denotes a remote control unit, which includes a remote control TV monitor 611 that switches and displays images from the TV cameras 210 , 220 , and 230 , a remote control operation panel 612 that is almost similar to the operation panels of the exposure apparatuses 110 , 120 , and 130 , and an operation panel 612 .
It is provided with at least a remote control parameter display 613 for displaying various operation setting conditions that do not appear above, and a selection switch 614 for specifying which one of the plurality of exposure apparatuses is to be operated. The selection switch 61
4 is a device changeover switch 511 of the device changeover unit 510;
, 512 , , 513 and the TV screen automatic switching unit 410, the remote control unit 610 selects an exposure apparatus (designated exposure apparatus) whose operation is to be controlled.

Generally, this remote control unit (remote control unit) 610 is connected to each other unit 210, 22.0.

230, 310, 320, 330, 410,
510 and the exposure apparatuses 110, 120, and 130 are installed at a distance of several tens of meters to several hundred meters, and are connected to each other by electrical cables or optical cables that are resistant to electrical noise.

FIG. 2 shows a more detailed diagram of the exposure apparatus 110 and buffer unit 310 portions of FIG. 1.

The exposure apparatus 110 includes an operation panel 111, and the operation panel 111 has functional elements (operators) necessary for operations for projecting and printing a mask pattern onto a semiconductor wafer. i.e. a joystick (or "knob" capable of setting continuous displacements) for manual wafer or mask alignment 112
, a plurality of setting switches 113 for setting the alignment conditions, and a plurality of indicators 114 for displaying information on the alignment status. In addition, this exposure device 11
G has a controller 115 that electrically controls the operation of the entire device.

In a conventional exposure apparatus, when the apparatus is used alone, an instruction signal from an operation panel 111 is directly input to a controller 115, and apparatus drive information is output from the controller 115 and displayed on the operation panel 111.

However, in order to carry out remote control, it is preferable that the exposure apparatus be able to be operated alone and also be operated from a remote location. Therefore, in this embodiment, a buffer unit 310 is provided, and the controller 115 and panel 111
Alternatively, a remote control operation panel 612 of a remote control 610 is selectively connected via the unit 310.

The buffer unit 310 includes an interface circuit 3111 for transmitting and receiving signals mainly from the operation panel 111 of the exposure apparatus 110 or signals to the operation panel lit; an interface circuit 312 for transmitting and receiving signals to the remote control unit 610; It has an interface circuit 316 for transmitting and receiving signals to and from the controller 115.

Buffer unit 310 also includes a changeover switch circuit 313 that switches between a signal from exposure apparatus 110 and a signal from remote control unit 610, and selects one of the signals to transmit and receive signals to and from controller 115.

The buffer unit 310 further includes a parameter memory circuit 314 and a parameter display 315, and allows setting conditions on the operation panel 111 of the exposure apparatus 110 to be changed via a changeover switch circuit 313.
0 is stored in the parameter memory circuit 314 via the panel changeover switch 512, the stored contents of the parameter memory circuit 314 are displayed on the parameter display 315, and the remote control unit 61
When the 0 side is selected, the interface circuit 312
The stored contents of the parameter memory circuit 314 are also displayed on the remote control parameter display 613 via the device changeover switch 513 provided in the device changeover unit 510.

FIG. 3 shows the configuration of panel 111 in more detail. In the figure, each part 112 of the operation panel 111.

113 and 114 are basically configured as follows. In other words, the joystick (or "kumami" which can set continuous displacement) 112 outputs a voltage level to the controller 115 using a variable resistor. 116 (analog-digital conversion circuit), the signal is converted into a digital value of predetermined bits (8 bits in this case) and used.

The setting switch i13 has a 1-bit pushbutton switch or thumbwheel switch as a basic component, and outputs a low/high voltage digital signal to the controller 115 depending on the on/off (connection/disconnection) of each switch element. .

The status indicator 114 is output from the controller 115 (D fH
The basic components are light-emitting diodes or lamps that turn on/off depending on the number (high/low), or display elements that display characters such as alphabets and numbers.

The joystick 112, switch 113, display 114, etc. of the operation panel 111 are generally placed at a location separate from the controller 115 that controls them in order to make them easier to physically operate. In addition, these joystick 112, switch 113, and display 114 are electrically connected to a control circuit 11 that controls them.
7 is connected.

The operation panel 111 is made up of various combinations of the above-described three basic components: the joystick 112, the switch 113, and the display 114, that is, the variable resistor, the switch, and the display element.

The purpose of this embodiment is to enable remote control of the consoles of a plurality of exposure apparatuses from one location. This will be explained in terms of an electrical circuit according to the drawings.

■ Selection of operation panel (exposure apparatus/remote control unit) In FIG. via or directly interface 311
is combined with The operation console 111 includes a changeover switch circuit 313 (a changeover switch 313a and a changeover control circuit 313).
For example, when the changeover switch 313a indicates the high potential side, the changeover control circuit 313b causes the controller 11 of the exposure apparatus 110 to
It is electrically coupled to the interface circuit 31B which is connected to the interface circuit 31B. As a result, the operation of the exposure apparatus 110 is controlled by the operation console 111 and the controller 115. The signal digitized by the A/D converter 317 is sent to the D/A converter (analog-digital conversion circuit) 3
18 converts it into the original analog signal and sends it to controller 1.
15 is input. The purpose of performing complex electrical conversions in this way is to eliminate the effects of electrical noise when connecting cables between each device and each unit.
If the cable length is not very long or if the environment is good and the electrical noise is low, analog signals may be directly switched and transferred.

On the other hand, when the changeover switch 313a indicates the low potential side, the remote control console 612 of the remote control unit 610
11a, 511b, 512 and interface circuits 312, 316 to the controller 115 of the exposure apparatus 110. At this time, the operation of the exposure apparatus 110 is controlled by a console (remote control panel) 612 on the remote control unit BIO and a controller 115.

(2) Parameter memory and parameter display As already mentioned in FIG. 2, it is necessary to set many conditions for the exposure apparatus 110 to operate. For example, the lighting time of an illumination lamp for printing a mask pattern on a semiconductor wafer,
That is, setting the exposure time is important. Furthermore, when the mask and wafer are automatically aligned, setting the alignment position difference (offset amount) is important for multiple printing.

In this embodiment, information for setting the place name type conditions (parameters) can be input from both the operation panel 111 of the exposure apparatus 110 and the remote control operation panel 612 of the remote control unit 610 in FIG. be. However, the exposure apparatus 110 itself operates according to only one parameter. Therefore, after setting parameters by operating one operation panel 111 (or 612), the other operation panel 612 (or 612)
11) If the parameter settings are different between the two, the exposure apparatus 110 itself may malfunction. In order to avoid this, in this embodiment, a parameter memory 314 and a parameter display 315 for displaying its contents are provided.

That is, the parameter memory 314 stores various parameters set by any operation panel, holds the parameters, and uses them as operating conditions for the exposure apparatus 110 until the parameters are reset by the next operation panel.

Further, the parameter memory circuit 314 is configured by a device that can be freely rewritten and read. For example, it may be composed of a so-called RAM, which is a semiconductor memory, or a floppy disk, which is a magnetic memory. When the parameter memory 314 is configured with a semiconductor memory RAM, the data is backed up by a battery 319 so that the memory contents do not disappear even when the power of each device or unit is turned off.

If the parameter memory 314 is RAM, the battery 319
If the exposure device 110 is backed up by , the exposure device 110 can always be operated under the same conditions (parameters) even if the day changes, which is more preferable for routine paddy work.

The contents of the parameter memory 314 are displayed on the parameter display 31.
5, and the conditions under which the exposure apparatus 110 is operating can be confirmed. It is desirable that this parameter display 315 be located near the operation panel 115 of the exposure apparatus 110. Since the remote control operation panel 612 of the remote control unit 610 is located further away than the exposure apparatus 110, another parameter display may be operated under the control panel 115 of the exposure apparatus 110. It is also provided near the panel 612. In this embodiment, the remote control parameter display 61
3 in the remote control unit 610. Electrically, the parameter memory 314 transmits its contents via the interface circuit 312 and the device changeover switch 513 of the device changeover unit 510 by a changeover control circuit 313b composed of a microcomputer circuit, and displays it on the remote control parameter display 613. .

(2) Device Switching Unit Next, details of the device switching unit 510 of this embodiment will be explained with reference to FIG.

The device switching unit 510 is electrically constituted by, for example, a microcomputer circuit. The switching function is performed by hardware (electric circuit) and software. That is, the components of the microcomputer control circuit 520 are a main control circuit 520a, a temporary storage circuit 520b, a program storage circuit 5200, etc., and further includes interface circuits 521, 522, 523 with each device and a remote control unit 610 as peripheral circuits. interface circuit 52
It is equipped with 4th class.

The remote control operation panel 612 of the remote control unit 610 is electrically coupled to the interface circuit 524 of the device switching unit 510 via the A-D converter 615 and the remote control parameter display 613 directly. For example, when "1°" is selected with the selection switch 614, the remote control operation panel 612 and the remote control parameter display 613
However, the microcomputer control circuit 520 of the device switching unit 510
Therefore, it is electrically coupled to the exposure apparatus 110 via the interface circuit 524, the interface circuit 521, and the buffer unit 310. As a result, exposure device 1
10 is a remote control operation panel 6 of a remote control unit 610
The operation is controlled by 12.

When the selection switch 614 selects "2" or "°3", the respective exposure devices 120 or 130 are similarly operated by the remote control operation panel 612.

■ TV camera/TV monitor Each exposure device 110, 120, 130 is equipped with a TV left camera 10, 220, 230 on an alignment scope, and the images captured by these cameras are projected on the remote control TV monitor 611 screen to display the images before exposure. The remote control unit 6 performs wafer alignment or searching for defects on the wafer.
This can be confirmed on the 10 side.

That is, when the selection switch 614 selects "1",
The gate 411 of the TV screen automatic switching unit 410 is opened by the microcomputer control circuit 520 of the device switching unit 510, and the video signal from the TV left camera 10 of the exposure device 110 is sent to the remote control unit 81 via the OR circuit 414.
0's remote control TV monitor 611 and displayed.

Similarly, when the selection switch 614 selects "2" or "3", the video signals from the TV cameras 220 and 230 of the exposure devices 120 and 130 are sent to the remote control TV monitor 611 via the gates 412 and 413 and the OR circuit 414, respectively.
The status of each wafer is displayed on the screen.

The alignment scope of each exposure device allows the operator to observe the wafer condition with the naked eye.
It is also possible to observe and hold it on a monitor screen.

Furthermore, when the selection switch 614 of the remote control unit 610 is "OFF", the microcomputer control circuit 520
By the function of the automatic screen switching unit 410, the images of the TV left cameras 10, 220, 230 (7) are sequentially switched in time and displayed on the screen of the remote control TV monitor 611.

The TV monitors 211, 221, 231 near each exposure device 110, 120, 130 are unrelated to the selection of the selection switch.
(], 013) Only images of 013 are displayed.

The remote control operation panel 612 has the same function as the operation panel 111 of the exposure apparatus 110, for example, and is connected to an A-D converter [15 is also an A-D converter 116 in the controller 115 (FIG. 143)] or a buffer unit 310.
This is equivalent to the A-D converter 317 (FIG. 4).

Further, the remote control parameter display 613 is equivalent to the parameter display 315 of the buffer unit 310, for example.

■Alarm status Each of the exposure devices 110, 120, and 130 is also equipped with a function that automatically detects abnormal operation and issues a warning by flashing a lamp or sounding a buzzer.At the same time, an alarm signal is sent to each buffer unit. 310°320, 33
0 to the respective interface circuits 521, 522, and 523 of the device switching unit 510, and is input to the remote control unit 6 via the interface circuit 524 by the alarm circuit 525 in the microcomputer control circuit 520.
The operator of the remote control unit 612 is alerted to which exposure device an abnormality has occurred by sounding the buzzer or flashing the lamp of the twelve abnormality alarm units 616.

In response to this, the operator selects the corresponding exposure device using the selection switch 614, and electrically connects the screen of the remote control TV monitor 611, the remote control operation panel 612, and the remote control parameter display 613 to the exposure device. Correct abnormal conditions by manual operation.

When the operation is restored to normal, the mode is returned to automatic again, and the selection switch 614 is turned off to stand by.

The remote control TV monitor of the remote control unit 610 is
Although only one TV monitor is used in the example shown in FIG. 5, it is also possible to have as many remote control TV monitors as there are exposure apparatuses. In this case, T
Although the physical space of the V monitor is required, the TV screen automatic switching unit 410 is no longer necessary, and each TV camera 210
, 220, 23Q and a TV monitor using a cable. Alternatively, you can divide the screen area into multiple screens using only one TV screen, and display the screen area on multiple TV screens.
The present invention can also be realized by displaying V camera images at the same time.

Abnormality alarm unit 616 of remote control unit 610
An example has already been described in which the operator switches the selection switch 614 to the corresponding exposure apparatus in response to an alarm. 612 and the remote control parameter display 613 can also contribute to labor savings for the remote control operator. However, in this case, when a plurality of exposure apparatuses malfunctions, it is necessary to automatically wait for their turn. Furthermore, when an abnormality occurs in a plurality of devices, the buzzer alarm may be inconvenient for the operator, so a structure may be adopted in which only the lamp corresponding to the abnormal exposure device blinks.

FIG. 6 shows another embodiment of the invention. In the same figure,
The remote control unit 610 controls four exposure apparatuses 110, 1
20 , 130 , 140 , and similarly, remote control units 620 , 630 , 640 each control the exposure apparatus 11 .
10~1143.2110~2140.3110~31
Control 40.

In addition, exposure devices 110 to 140, 1110 to 1143
．． 2110-2140.3110-3140 is manufacturing plant A
The remote control units 620 , 630 ,
640 is installed in remote control room B isolated from manufacturing plant A.

[Effects of the Invention] As described above, the remote control unit according to the present invention has the sixth
As shown in the figure, exposure devices 110 and 120 are provided.

It can be installed in a remote control room B that is isolated from the manufacturing plant A where ...... is located. Conventionally, exposure apparatus 110
, 120, . . . had to enter the manufacturing plant A, but according to the present invention, only a small number of operators need to enter the remote control room B and perform the operations. At this time, there is basically no need for even a single person to enter the manufacturing plant A, and the benefit of human labor is “
0'', which greatly contributes to improving the manufacturing yield of LSI etc.

Furthermore, since a large number of exposure apparatuses can be operated by a small number of remote control units, the number of operator factors can be greatly reduced.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a semiconductor manufacturing system according to an embodiment of the present invention, FIGS. 2 to 5 are detailed block diagrams of each part of the system of FIG. 1, and FIG. 6 is a block diagram of a semiconductor manufacturing system according to an embodiment of the present invention. 1 is an equipment layout and a block diagram of a semiconductor manufacturing system according to an embodiment. FIG. 110, 120, 130, 1110
~1143. 2110~2140°3110~314
0: Exposure device (substrate processing section) 111: Operation panel 115: Controllers 210, 220, 230: TV camera 310
, 320 , 330 : Buffer unit 313 : Changeover switch circuit 314 : Parameter memory circuit 315 : Parameter display 410 : TV screen automatic changeover unit 510 : Device changeover unit 511 , 512 , 513 : Device changeover switch 6
10, 620, 630, 640: Remote control unit 611: Remote control TV monitor 612: Remote control operation panel 613: Remote control parameter display 614: Selection switch A: Manufacturing site B: Remote control room Figure 2, Porridge 3, Figure 6

Claims (1)

[Scope of Claims] 1. A plurality of substrate processing units each having a controller and processing a substrate under the control of the controller, and a plurality of substrate processing units provided for each substrate processing unit and storing operating condition setting parameters for the processing unit. a plurality of memory means for: a remote control console; a selection means for selecting one of the operating condition setting parameter display means and the substrate processing section, which is provided at or near the remote control console; switching means for enabling information transmission between the controller and memory means of the selected substrate processing section and the remote control console and parameter display means; A semiconductor manufacturing system characterized by being able to be controlled remotely and centrally from a console. 2. Each of the substrate processing units is provided with a TV camera for monitoring the processing unit, and a TV monitor for displaying images from the TV camera is provided on or near the remote control console, Claim 1 The semiconductor manufacturing system described. 3. The number of TV monitors provided for the plurality of substrate processing sections is one, and only the image of the TV camera of the substrate processing section selected by the selection means among the respective TV cameras is displayed on the one TV. 3. The semiconductor manufacturing system according to claim 2, further comprising second switching means for displaying information on a monitor. 4. Make one TV monitor correspond to the plurality of TV cameras, and divide the screen of the TV monitor into a plurality of screen areas including one main screen area and one or more sub-screen areas, and Claim 2, wherein the video of the TV camera of the processing unit selected by the selection means among the TV cameras is displayed in the main screen area, and the video of other TV cameras is displayed in the sub-screen area. Semiconductor manufacturing system. 5. The semiconductor manufacturing system according to claim 1, wherein each of the substrate processing units is provided with an operation panel, and the switching means switches and connects the operation panel and the remote control console to the controller. . 6. The semiconductor manufacturing system according to claim 1, wherein the memory means and the switching means are attached to the substrate processing section. 7. The semiconductor manufacturing system according to claim 1, wherein a second operating condition setting parameter display means is provided at or near the switching means. 6. A substrate processing unit that has a controller and an operation panel for inputting commands and operation information to the controller, and processes a substrate under the control of the controller, a remote control console, and the remote control operation A selection means for selecting one of the console and the operation panel; and a switching means for enabling information transmission between the remote control console and the selected side of the operation panel and the controller. Semiconductor manufacturing system. 9. The selection means is provided on the remote control console, and the switching means is applied only when the remote control console is connected and the remote control console is selected by the selection means. 9. The semiconductor manufacturing system according to claim 8, wherein a remote control console and the controller are connected. 10. The semiconductor manufacturing system according to claim 8, wherein the switching means is attached to the substrate processing section. 11. One TV monitor is made to correspond to the plurality of TV cameras, and the screen of one TV monitor is temporally divided into a plurality of screens (areas), and among the TV cameras, the selection means 3. The semiconductor manufacturing system according to claim 2, wherein the image of the TV camera of the selected processing unit is displayed on the screen, and the images of other TV cameras are not displayed during that time, but are displayed sequentially for a predetermined time.