JPS63165849U - - Google Patents
Info
- Publication number
- JPS63165849U JPS63165849U JP5940787U JP5940787U JPS63165849U JP S63165849 U JPS63165849 U JP S63165849U JP 5940787 U JP5940787 U JP 5940787U JP 5940787 U JP5940787 U JP 5940787U JP S63165849 U JPS63165849 U JP S63165849U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck plate
- holding surface
- circuit operation
- suction holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5940787U JPS63165849U (ru) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5940787U JPS63165849U (ru) | 1987-04-20 | 1987-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63165849U true JPS63165849U (ru) | 1988-10-28 |
Family
ID=30890872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5940787U Pending JPS63165849U (ru) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63165849U (ru) |
-
1987
- 1987-04-20 JP JP5940787U patent/JPS63165849U/ja active Pending