JPS63165843U - - Google Patents
Info
- Publication number
- JPS63165843U JPS63165843U JP5877687U JP5877687U JPS63165843U JP S63165843 U JPS63165843 U JP S63165843U JP 5877687 U JP5877687 U JP 5877687U JP 5877687 U JP5877687 U JP 5877687U JP S63165843 U JPS63165843 U JP S63165843U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- exhaust pipe
- suction pipe
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877687U JPS63165843U (cs) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877687U JPS63165843U (cs) | 1987-04-20 | 1987-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63165843U true JPS63165843U (cs) | 1988-10-28 |
Family
ID=30889650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5877687U Pending JPS63165843U (cs) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63165843U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04133430U (ja) * | 1991-03-22 | 1992-12-11 | 国際電気株式会社 | 半導体製造装置のガス管接続装置 |
-
1987
- 1987-04-20 JP JP5877687U patent/JPS63165843U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04133430U (ja) * | 1991-03-22 | 1992-12-11 | 国際電気株式会社 | 半導体製造装置のガス管接続装置 |