JPS63165543U - - Google Patents
Info
- Publication number
- JPS63165543U JPS63165543U JP5778887U JP5778887U JPS63165543U JP S63165543 U JPS63165543 U JP S63165543U JP 5778887 U JP5778887 U JP 5778887U JP 5778887 U JP5778887 U JP 5778887U JP S63165543 U JPS63165543 U JP S63165543U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- rigid body
- central rigid
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5778887U JPS63165543U (OSRAM) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5778887U JPS63165543U (OSRAM) | 1987-04-15 | 1987-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63165543U true JPS63165543U (OSRAM) | 1988-10-27 |
Family
ID=30887805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5778887U Pending JPS63165543U (OSRAM) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63165543U (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002340718A (ja) * | 2001-05-16 | 2002-11-27 | Yokogawa Electric Corp | 圧力計 |
| JP2005037314A (ja) * | 2003-07-18 | 2005-02-10 | Myotoku Ltd | 光干渉型圧力センサ |
| JP2010019828A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー用ダイアフラムおよび圧力センサー |
-
1987
- 1987-04-15 JP JP5778887U patent/JPS63165543U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002340718A (ja) * | 2001-05-16 | 2002-11-27 | Yokogawa Electric Corp | 圧力計 |
| JP2005037314A (ja) * | 2003-07-18 | 2005-02-10 | Myotoku Ltd | 光干渉型圧力センサ |
| JP2010019828A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー用ダイアフラムおよび圧力センサー |
| TWI394942B (zh) * | 2008-06-11 | 2013-05-01 | Seiko Epson Corp | 壓力感測器 |