JPS6316539A - Surface analyzing high vacuum device - Google Patents

Abstract

PURPOSE:To make a lot of samples efficiently analyzable as well as to aim at simplification and miniaturization is structure, by forming a specific bellows, and installing a sample holding part and an on-off valve closing up an opening tight or the like in a tip of the sample supporting lever attached to the bottom surface. CONSTITUTION:In this device, there are provided with a device 3 irradiating X-rays to a sample 11 and a detector 4 for energy analysis of the photoelectron generated or the like. In addition, one end of a bellows 5 is connected to an analytic chamber 2 being exhausted to a high vacuum, and a base end of a sample supporting lever 8 is attached to the bottom surface, then a sample holding part 12 is formed at the tip, while an on-off valve 14 is installed in a proper position of this supporting lever 8. When the sample 11 is replaced, the bellows 5 is compressed whereby the sample 11 at the tip of the supporting lever 8 is fed to an exchange chamber 6 and simultaneously an opening 7 of the on-off valve 14 is closed, and afterward the exchange chamber 6 is opened to atmosphere. With this constitution, an exchange of the sample 11 is efficiently performed, thus desired surface treatment is applicable to the sample 11 and, what is more, miniaturization in the device is well promoted.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for applying an electron beam, x! ! Alternatively, the present invention relates to a high vacuum apparatus for use in analyzing the physical properties of a sample surface by analyzing the energy of photoelectrons, Auger electrons, etc. generated by irradiating a light beam or the like.

In order to efficiently analyze a large number of samples with such an apparatus, it is necessary to exchange samples without breaking the vacuum in the analysis chamber. However, conventional devices either do not allow this or require extremely complex and large equipment. Therefore, the present invention provides an apparatus that has a simple mechanism and can easily and quickly perform sample exchange, surface treatment, etc.

The present invention can be applied to a sample such as X! One end of the bellows is connected to the wall of the analysis chamber, which is equipped with a device for irradiating II and a detector for energy analysis of the generated photoelectrons, and is evacuated to a high vacuum.The base of the sample support rod is attached to the bottom of the bellows. Tie the ends together;
A sample holding portion is formed at the tip, and an on-off valve is provided at an appropriate position on this support rod. and an opening for sample exchange is provided in the part facing the bellows in the analysis chamber,
A sample exchange room is placed outside of the chamber. Therefore, when exchanging samples, by compressing the bellows,
At the same time as the sample at the tip of the support rod is sent into the exchange chamber, the opening is closed by the on-off valve, and then the exchange chamber is opened to the atmosphere to exchange the sample, or any gas is sent into this exchange chamber and the sample is exchanged. The sample can be subjected to desired surface treatments such as heating. Furthermore, as mentioned above, the mechanism is simple and easy to operate, and the device can be made compact.

FIG. 1 is a schematic diagram of a longitudinal section during sample exchange or processing according to an embodiment of the present invention. That is, an analysis chamber 2 connected to a high vacuum pump via a valve 1 includes, for example, an X-ray generator 3 for irradiating a sample with X-rays to generate photoelectrons, and an X-ray generator 3 for capturing photoelectrons generated from the sample. A detector 4 is provided for performing velocity analysis and the like. The open end of a bellows 5 is connected to the analysis chamber 2, and a conical open lower portion communicating with a sample exchange chamber 6 is formed at a position facing the bellows so as to face the bellows 5. In addition, a sample support rod 8 is arranged coaxially with the bellows 5, one end of which is tied to the bottom surface 9 of the bellows, and an on-off valve 10 with a conical cross section is formed at an appropriate position, and the tip is connected to the sample 11. Holding part I2
It's Toshide. The exchange chamber 6 can exchange the sample 11 by disconnecting the connection part 13, and also has a gas conduit 5.15 with an on-off valve 14.14 and a valve I6 for surface treatment.
An exhaust port 17 having a heat treatment, a heater 18 for heat treatment, etc. are provided. Further, a large-diameter opening/closing valve I9 is provided between the opening lower and the analysis chamber 2 as necessary, and the bottom surface 9 of the bellows 5 is slidably supported by a support 20° 20, and is not shown. However, a motor etc. to drive this is provided. Figure 2 is a schematic longitudinal cross-sectional view of the state in which the bellows 5 is extended by the motor and analysis is performed;
The figure is an enlarged view of the on-off valve 19 in the state shown in FIG. 2, and FIG. 4 is a cross-sectional view taken along line A-A. analysis room 2
An O-ring 23 is provided on the periphery of the movable element 21 in order to open and close the opening 22 leading to the movable element 21.

In the above-mentioned apparatus, in the state shown in FIG. 1, the on-off valve 10 is strongly pressed against the conical opening lower part at atmospheric pressure, and the analysis chamber 2 is maintained at a high vacuum. Therefore, after opening the connection part I3 and exchanging the sample 11, the exchange chamber 6 is evacuated, and if necessary, gas for reduction treatment is sent in from the conduit 15, and the sample is heated by the heater 18. Surface treatment etc. can be applied.

Next, after the exchange chamber 6 is evacuated to a sufficiently high vacuum, the bellows 5 is extended by the motor as shown in FIG. 2, so that the sample 11 is opposed to the X-ray generator 3, detector 4, etc. Kaben 1
9 is closed, the analysis chamber 2 is evacuated to a sufficiently high vacuum, and the desired analysis is performed. Note that when the on-off valve 19 is provided as in the embodiment, the exchange chamber 6 can be opened in this state to perform desired treatment.

As described above, the apparatus of the present invention allows sample exchange, surface treatment, etc. to be easily performed, and since the analysis chamber is always kept in a high vacuum state, a sufficiently high degree of vacuum can be maintained. Therefore, it is possible to efficiently analyze a large number of samples without the drawback that it takes a long time to reach high vacuum after sample exchange. Moreover, a compact device with a simple configuration can be obtained, and it is also easy to handle.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing the configuration of an embodiment of the present invention in a state where a sample is replaced, Fig. 2 is a sectional view of the sample analysis state in the apparatus shown in Fig. An enlarged view of the on-off valve used in the device, Figure 4 is A-A in Figure 3.
FIG. In the figure, 1. +4.16.19 is a valve, 2 is an analysis room, 3 is an X-ray generator, 4 is a photoelectronic detector,
5 is a bellows, 6 is a sample exchange chamber, 7 is an opening, 8 is a sample support rod, 9 is the bottom of the bellows, 10 is an on-off valve, I is a sample, 12 is a sample holding part, 13 is a connecting part, 17 is an exhaust mouth, 2
0 is a strut, 21 is a valve mover, 22 is a valve opening, 23
is an O-ring.

Claims (1)

[Claims] The open end of the bellows is connected to the wall of the analysis chamber that is evacuated to a high vacuum, and an opening leading to the sample exchange chamber is formed opposite to the bellows, and the proximal end is arranged coaxially with the bellows. A sample holding portion is formed at the tip of a sample support rod attached to the bottom surface of the bellows, and an on-off valve is provided at an appropriate position on the sample support rod to press against the edge of the opening to seal the opening. Characteristic high vacuum equipment for surface analysis